Search results for: coherent interface

Authors: Masoud Fathi Kazerouni, Jens Schlemper, Klaus-Dieter Kuhnert

Abstract:

Green planet is one of the Earth’s names which is known as a terrestrial planet and also can be named the fifth largest planet of the solar system as another scientific interpretation. Plants do not have a constant and steady distribution all around the world, and even plant species’ variations are not the same in one specific region. Presence of plants is not only limited to one field like botany; they exist in different fields such as literature and mythology and they hold useful and inestimable historical records. No one can imagine the world without oxygen which is produced mostly by plants. Their influences become more manifest since no other live species can exist on earth without plants as they form the basic food staples too. Regulation of water cycle and oxygen production are the other roles of plants. The roles affect environment and climate. Plants are the main components of agricultural activities. Many countries benefit from these activities. Therefore, plants have impacts on political and economic situations and future of countries. Due to importance of plants and their roles, study of plants is essential in various fields. Consideration of their different applications leads to focus on details of them too. Automatic recognition of plants is a novel field to contribute other researches and future of studies. Moreover, plants can survive their life in different places and regions by means of adaptations. Therefore, adaptations are their special factors to help them in hard life situations. Weather condition is one of the parameters which affect plants life and their existence in one area. Recognition of plants in different weather conditions is a new window of research in the field. Only natural images are usable to consider weather conditions as new factors. Thus, it will be a generalized and useful system. In order to have a general system, distance from the camera to plants is considered as another factor. The other considered factor is change of light intensity in environment as it changes during the day. Adding these factors leads to a huge challenge to invent an accurate and secure system. Development of an efficient plant recognition system is essential and effective. One important component of plant is leaf which can be used to implement automatic systems for plant recognition without any human interface and interaction. Due to the nature of used images, characteristic investigation of plants is done. Leaves of plants are the first characteristics to select as trusty parts. Four different plant species are specified for the goal to classify them with an accurate system. The current paper is devoted to principal directions of the proposed methods and implemented system, image dataset, and results. The procedure of algorithm and classification is explained in details. First steps, feature detection and description of visual information, are outperformed by using Scale invariant feature transform (SIFT), HARRIS-SIFT, and FAST-SIFT methods. The accuracy of the implemented methods is computed. In addition to comparison, robustness and efficiency of results in different conditions are investigated and explained.

Keywords: SIFT combination, feature extraction, feature detection, natural images, natural plant recognition, HARRIS-SIFT, FAST-SIFT.

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Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

Abstract:

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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