Curing Methods Yield Multiple Refractive Index of Benzocyclobutene Polymer Film
Refractive index control of benzocyclobutene (BCB 4024-40) is achieved by facilitating different conditions during the thermal curing of BCB film. Refractive index (RI) change of 1.49% is obtained with curing of BCB film using an oven, while the RI change is 0.1% when the BCB is cured using a hotplate. The two different curing methods exhibit a temperature dependent refractive index change of the BCB photosensitive polymer. By carefully controlling the curing conditions, multiple layers of BCB with different RI can be fabricated, which can then be applied in the fabrication of optical waveguides.
Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1327680Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2267
 L. Eldada and L. W. Shacklette, "Advances in polymer integrated optic," IEEE J. Select. Top. Quant. Electron. vol.6, pp.54-68, 2000.
 Y. B. P. Edwin and W. H. Wong, "Polymeric waveguides and devices for integrated optics application".
 K. Ohba," Overview of photo-definable Benzocyclobutene Polymer", J. Photopolym. Sci. Technol.vol. 15, no. 2, pp. 177-182, 2002.
 Dow, "Processing procedure for CYCLOTENE 4000 Series Photo-BCB Resins (Puddle Develop Process)", CYCLOTENE Advanced Electronics Resins, pp. 1-9, February 2005.
 Garrou, P.E., Heistand, R.H., Dibbs, M., Manial, T.A., Mohler, C., Stokich, T.,Townsend, P.H., Adema, G.M.,Berry, M.J., Turlik, I., "Rapid thermal curing of BCB dielectric," Electronic Components and Technology Conference, 1992. Proceedings., 42nd , vol., no., pp.770- 775, 18-20 May 1992
 H. Ma, A.K.-y. Jen, L.R. Dalton, "Polymer-Based Optical Waveguides: Materials, Processing, and Devices," Adv. Mater. (Weinheim, Ger.), vol. 14, no. 19, pp. 1339-1365, 2002.
 K. C. Chan, M. Teo, Z. W. Zhong, "Characterization of low-k benzocyclobutene dielectric thin film," Microelectron. Int., vol. 20, no. 3, pp. 11-22, 2003.