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Fabricating Protruded Micro-features on AA6061 Substrates by Hot Embossing Method

Authors: Nhat Khoa Tran, Yee Cheong Lam, Chee Yoon Yue, Ming Jen Tan

Abstract:

Metallic micro parts are playing an important role in micro-fabrication industry. Recently, we have demonstrated a new deformation mechanism for micro-formability of polycrystalline materials. Different depressed micro-features smaller than the grain size have been successfully fabricated on 6061 aluminum alloy (AA6061) substrates with good fidelity. To further verify this proposed deformation mechanism that grain size is not a limiting factor, we demonstrate here that in addition of depressed features, protruded micro-features on a polycrystalline substrate can similarly be fabricated.

Keywords: Microfabrication, Polycrystalline Materials, grain size, deformation mechanism

Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1334173

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