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Selective Wet-Etching of Amorphous/Crystallized Sb20se80 Thin Films

Authors: O. Shiman, V. Gerbreders, E. Sledevskis, A. Bulanovs, V.Pashkevich


The selective wet-etching of amorphous and crystalline region of Sb20Se80 thin films was carried out using organic based solution e.g. amines. We report the development of an in situ real-time method to study the wet chemical etching process of thin films. Characterization of the structure and surface of films studied by X-ray diffraction, SEM and EBSD methods has been done and potential application suggested.

Keywords: amorphous and crystalline phases, chalcogenide thinfilm, etching process

Digital Object Identifier (DOI):

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[1] A. V. Stronski, M. Vlcek, A. Sklenar, P. E. Shepeljavi, S. A. Kostyukevich, T. Wagner ÔÇ×Application of As40S60-xSex layers for highefficiency grating production" J. Non-Cryst. Solids vol. 266-269, part 2, pp. 973-978, May 2000.
[2] M. Vlcek, J. Prokop, M. Frumar ÔÇ×Positive and negative etching of As-S thin layers" Int. J. Electr. vol. 77, no. 6, pp. 969 - 973, Jun. 1994.
[3] K. Tanaka "Photo-induced phenomena in chalcogenide glass: comparison with those in oxide glass and polymer" J. Non-Cryst. Solids vol. 352, no. 23-25, pp. 2580-2584, Jul. 2006.
[4] Y. Utsugi "Chemical modification for nanolithography using scanning tunneling microscopy" Nanotechnology vol. 3, pp.161-163, Jul. 1992.
[5] N. Tokushuku, K. Moritani, H. Yanagihara, K. Konishi, Y. Noro "High C/N recording in Sb2Se3/Bi write-once disk" Jpn. J. Appl. Phys. vol. 31, no. 2B, pp. 456-460, Feb. 1992.
[6] R. Barton, C.R. Davis, K. Rubin, G. Lim ÔÇ×New Phase Change Material for Optical Recording with Short Erase Time" Appl. Phys. Lett. vol. 48, no. 19, pp. 1255-1257, May 1986.
[7] J. Orava, T. Wagner, M. Krbal, T. Kohoutek, Mil. Vlcek, L. Benes, E. Kotulanova, P. Bezdicka, P. Klapetek, M. Frumar "Selective wet-etching of amorphous/crystallized Ag-As-S and Ag-As-S-Se chalcogenide thin films" Journal of Physics and Chemistry of Solids vol. 68, no. 5-6, pp. 1008-1013, May-Jun. 2007.
[8] J. Orava, T. Wagner, M. Krbal, T. Kohoutek, Mil. Vlcek, P. Klapetek, M. Frumar "Selective dissolution of Agx(As0.33S0.67-ySey)100_x chalcogenide thin films" J. Non-Cryst. Solids vol. 354, no. 2-9, pp.533- 539, Jan. 2008.
[9] J. Orava, T. Wagner, M. Krbal, T. Kohoutek, Mil. Vlcek, M. Frumar "Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions" J. Non-Cryst. Solids vol. 353, no. 13-15, pp. 1441-1445, May 2007.
[10] J. Orava, T. Wagner, M. Krbal, T. Kohoutek, Mil. Vlcek, M. Frumar "Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions" J. Non-Cryst. Solids vol. 352, no. 9-20, pp. 1637-1640, Jun. 2006.
[11] Mir. Vlček, S. Schroeter, J. Čech, T. Wágner, T. Glaser "Selective etching of chalcogenides and its application for fabrication of diffractive optical elements" J. Non-Cryst. Solids vol. 326-327, pp. 515-518, Oct. 2003.
[12] Vj. Gerbreder, J. Teteris, E. Sledevskis, A. Bulanovs "Photoinduced changes of optical reflectivity in As2S3-Al system" J. Optoelectron Adv. Mater. vol. 9, no. 10, pp. 3153-3156, Oct. 2007.
[13] H. Bao, S. Ye, B. Yuan, M. Lan, S. Zhou, Q. Wang "X-ray diffraction analysis of crystallization of SbxSey thin films" Proc. SPIE "Optical Thin Films V: New Developments" vol. 3133, p. 140-146, Oct. 1997.
[14] V. M. Rubish, P. P. Shtets, V. V. Rubish, D. G. Semak, B. R. Tsizh ÔÇ×Optical media for information recording based on amorphous layers of Sb-Se-In system", Journal of Optoelectronics and Advanced Materials, vol. 5, No. 5, pp. 1193 - 1197, Sept. 2003.
[15] ðæ.ðÆ.ðØðÁð║ÐÇð░Ðüð¥ð▓ ð×Ðüð¢ð¥ð▓Ðï ð¥ð▒ÐëðÁð╣ Ðàð©ð╝ð©ð©. ðóð¥ð╝ 1 ð©ðÀð┤ð░ð¢ð©ðÁ 3. ð£ð¥Ðüð║ð▓ð░. ðÿðÀð┤- ð▓ð¥ ðÑð©ð╝ð©ÐÅ, p. 353, 1973.
[16] ÔÇÿSelenium and selenium compounds" Kirk-Othmer Encyclopedia of Chemical Technology. John Wiley & Sons, Inc., p.3.
[17] Praveen K. Jain, Nidhi Jain, Narendra S. Saxena "A study of crystallization rate constant of Se-In-Sb chalcogenide glasses" Journal of Non-oxide Glasses Vol. 1, no. 2, pp. 96-102, May 2009.
[18] J.A . Small, J. R. Michael ÔÇ×Phase identification of individual crystalline particles by electron backscatter diffraction" Journal of Microscopy, vol. 201, no. 1, pp. 59-69, Jan. 2001.
[19] N. Starbov, V. Mankov, K. Starbova, K. Kolev, A. Jadin, L.D. Laude "CW-laser-induced spherulitic recrystallization in Sb-Se thin layer system" Proc. SPIE vol. 3404, pp. 209-214, May 1998.
[20] V. Yu. Kolosov, K. L. Shvamma, R. V. Gainutdinov, A. L. Tolstikhina "Combined TEM-AFM Study of "Transrotational" Spherulites Growing in Thin Amorphous Films" Bulletin of the Russian Academy of Sciences: Physics vol.71, no. 10, pp. 1442-1446, Oct. 2007.