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CMOS-Compatible Plasmonic Nanocircuits for On-Chip Integration

Authors: Shiyang Zhu, G. Q. Lo, D. L. Kwong


Silicon photonics is merging as a unified platform for driving photonic based telecommunications and for local photonic based interconnect but it suffers from large footprint as compared with the nanoelectronics. Plasmonics is an attractive alternative for nanophotonics. In this work, two CMOS compatible plasmonic waveguide platforms are compared. One is the horizontal metal-insulator-Si-insulator-metal nanoplasmonic waveguide and the other is metal-insulator-Si hybrid plasmonic waveguide. Various passive and active photonic devices have been experimentally demonstrated based on these two plasmonic waveguide platforms.

Keywords: Plasmonics, Silicon Photonics, on-chip integration

Digital Object Identifier (DOI):

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[1] D. J. Lockwood and L. Pavesi, “Silicon photonics II: components and integration”, Topic in Applied Physics, vol. 119, Springer-Verlag, Berlin (2011).
[2] E. Ozbay, “Plasmonics: merging photonics and electronics at nanoscale dimensions,” Science, vol. 311, pp. 189-193 (2006).
[3] S. I. Bozhevolnyi, “Plasmonic: nanguides and circuits,” Pan Stanford Pulishing Pte. Ltd. (2009).
[4] S. Y. Zhu, T. Y. Liow, G. Q. Lo, and D. L. Kwong, “Fully complementary metal-oxide-semiconductor compatible nanoplasmonic slot waveguides for silicon electronic photonic integrated circuits,” Appl. Phys. Lett., vol. 98, art no. 021107 (2011).
[5] S. Y. Zhu, T. Y. Liow, G. Q. Lo, and D. L. Kwong, “Silicon-based horizontal nanoplasmonic slot waveguides for on-chip integration,” Optics Express, vol. 19, pp. 8888-8902 (2011).
[6] S. Y. Zhu, G. Q. Lo, and D. L. Kwong, “Experimental demonstration of vertical Cu-SiO2-Si hybrid plasmonic waveguide components on an SOI platform,” IEEE Photo. Tech. Lett., vol. 24, pp. 1224-1226 (2012).
[7] S. Y. Zhu, G. Q. Lo, and D. L. Kwong, “Components for silicon plasmonic nanocircuits based on horizontal Cu-SiO2-Si-SiO2-Cu nanoplasmonic waveguides,” Optics Express, vol. 20, pp.5867-5881, (2012).