Commenced in January 2007
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Paper Count: 31575
##### Study on the Mechanical Behavior of the Varactor of a Micro-Phase Shifter

Abstract:

In this paper static and dynamic response of a varactor of a micro-phase shifter to DC, step DC and AC voltages have been studied. By presenting a mathematical modeling Galerkin-based step by step linearization method (SSLM) and Galerkin-based reduced order model have been used to solve the governing static and dynamic equations, respectively. The calculated static and dynamic pull-in voltages have been validated by previous experimental and theoretical results and a good agreement has been achieved. Then the frequency response and phase diagram of the system has been studied. It has been shown that applying the DC voltage shifts down the phase diagram and frequency response. Also increasing the damping ratio shifts up the phase diagram.

Keywords: MEMS, Phase Shifter, Pull-in Voltage, PhaseDiagram

Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1082613

References:

[1] M Basso., L Giarre., M.Dahleh, I. Mezic, Numerical analysis of complex dynamics in atomic force microscopes, In: Proceedings of the IEEE International Conference on Control Applications, Trieste, Italy, 1-4 September: 1026- 1030,1998.
[2] A. Nabian, Gh.Rezazadeh, M.Haddad-Derafshi, A.Tahmasebi, Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure, Microsystem Technologies 14: 235 240,2008.
[3] S.Senturia, Microsystem Design, Kluwer, Norwell, MA, USA. , 2001
[4] Gh.Rezazadeh, H.Sadeghian, E.Abbaspour, A comprehensive model to study nonlinear behaviour of multilayered micro beam switches, Microsystem Technologies, 14(1): 143,2008 .
[5] E.M.Abdel-Rahman, M.I.Younis, A.H.Nayfeh, Characterization of the mechanical behavior of an electrically actuated microbeam, Journal of Micromechanical Microengineering 12: 759-766.2002.
[6] Letter to Editor, , "A distributed MEMS phase shifter on a lowresistivity silicon substrate", Sensors and Actuators A 144, 207-212, 2008.
[7] N.S. Barker, G.M. Rebeiz, Distributed MEMS true-time delay phase shifters and wide band switches, IEEE Trans. Microw. Theory Tech. 46 (11) , 1881-1890, 1998.
[8] J.S. Hayden, G.M. Rebeiz, , 2-Bit MEMS distributed X-band phase shifters, IEEE Microwave Guided Wave Lett. 10 (12), 540-542,2000.
[9] J.S. Hayden, A. Malczewski, J. Kleber, C.L. Goldsmith, G.M. Rebeiz, , 2 and 4-Bit DC 18 GHz microstrip MEMS distributed phase shifters, in: IEEE MTT-S International Microwave Symposium Digest, Phoenix, USA, pp. 219-222, 2001.
[10] W. Palei, A.Q. Liu , A.B. Yu, A. Alphones, Y.H. Lee, , "Optimization of design and fabrication for micromachined true time delay (TTD) phase shifters"Sensors and Actuators A, 119, 446-454, 2005.
[11] B.K.A.Ngoi , K.Venkatakrishnan, N.R.Sivakumar , T.Bo, , "Instantaneous phase shifting arrangement for microsurface profiling of flat surfaces.optics communications 190, 109-116,2001.
[12] R . Smythe, R. More , , Instantaneous phase measuring interferometry, Optical Engineering 23(4), 361-365,1984.
[13] T.Mukherjee, G.K. Fedder, White J., Emerging simulation approaches for micromachined devices, IEEE Transaction Computer Aided Design Integr Circuits Syst 19: 1572-1589 , 2000 .
[14] S.D.Senturia, N.Aluru, J.White, Simulating the behavior of MEMS devices, IEEE Comput Sci Eng 4(1): 30-43 , 1997.
[15] R.K.Gupta, Electrostatic pull-in test structure design for in-situ mechanical property measurement of microelectromechanical systems (MEMS), Ph.D. dissertation, MIT, Cambridge, MA, 10-27 , 1997.
[16] Gh.Rezazadeh, A.Tahmasebi, M. Zubtsov, Application of piezoelectric layers in electrostatic mem actuators: Controlling of pull-in voltage, Microsystem Technologies 12(12): 1163-1170 , 2006.
[17] H.Nayfeh, Mook Nonlinear Oscillations. New York. Wiley,1979.
[18] Gh. Rezazadeh, M. Fathalilou, K. Shirazi, S. Talebian, "A Novel Relation between Pull-in Voltage of the Lumped and Distributed Models in Electrostatically-Actuated Microbeams", MEMSTECH-, 22-24 April,2009,Polyana-Svalyava(Zakarpattya), UKRAINE, 31-35,2009.
[19] E. S. Hung and S. D. Senturia ,"Generating efficient dynamical models forMicroelectromechanical systems from a few finite-element simulation runs", journal of Microelectromechanical Systems, vol. 8, pp. 280-289. 1999.
[20] M. I. Younis, E. M. Abdel-Rahman, A. Nayfeh ,"A Reduced-Order Model for Electrically Actuated Microbeam-Based MEMS", journal ofMicroelectromechanical systems, vol. 12, no. 5, pp. 672-680, 2003.