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Study on the Mechanical Behavior of the Varactor of a Micro-Phase Shifter

Authors: Mehrdad Nouri Khajavi, Sajjad Ahoui Ghazvin, Ghader Rezazadeh, Mohammad Fathalilou


In this paper static and dynamic response of a varactor of a micro-phase shifter to DC, step DC and AC voltages have been studied. By presenting a mathematical modeling Galerkin-based step by step linearization method (SSLM) and Galerkin-based reduced order model have been used to solve the governing static and dynamic equations, respectively. The calculated static and dynamic pull-in voltages have been validated by previous experimental and theoretical results and a good agreement has been achieved. Then the frequency response and phase diagram of the system has been studied. It has been shown that applying the DC voltage shifts down the phase diagram and frequency response. Also increasing the damping ratio shifts up the phase diagram.

Keywords: MEMS, phase shifter, Pull-in Voltage, PhaseDiagram

Digital Object Identifier (DOI):

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