Surface Topography Measurement by Confocal Spectral Interferometry
Commenced in January 2007
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Edition: International
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Surface Topography Measurement by Confocal Spectral Interferometry

Authors: A. Manallah, C. Meier


Confocal spectral interferometry (CSI) is an innovative optical method for determining microtopography of surfaces and thickness of transparent layers, based on the combination of two optical principles: confocal imaging, and spectral interferometry. Confocal optical system images at each instant a single point of the sample. The whole surface is reconstructed by plan scanning. The interference signal generated by mixing two white-light beams is analyzed using a spectrometer. In this work, five ‘rugotests’ of known standard roughnesses are investigated. The topography is then measured and illustrated, and the equivalent roughness is determined and compared with the standard values.

Keywords: Confocal spectral interferometry, Nondestructive testing, Optical metrology, Surface topography, Roughness.

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[1] Y. Usson & C. Souchier, “La tomographie en Microscopie”, Hermes Sciences, 2002, Ch. 5.
[2] B. Rivett et al., “Surface topography evolution through production of aluminium offset lithographic plates”, Wear, Vol. 270, Issues 3–4, 12 January 2011, pp. 204-217
[3] B. Michelt, J. Schulze, “The spectral colours of nanometers”, Reprint from the journal Mikroproduktion 2005 (3), MIKROvent GmbH MIKROvent, Mainburg
[4], Accessed on 03/10/2016.
[5], Accessed on 03/10/2016.
[6] J. M. Bennett & L. Mattsson, “Introduction to surface roughness and scattering”, Optical Society of America, Washington DC, 1999.