Effect of Chemical Additive on Fixed Abrasive Polishing of LBO Crystal with Non-water Based Slurry

Authors: Jun Li, Wenze Wang, Zhanggui Hu, Yongwei Zhu, Dunwen Zuo

Abstract:

Non-water based fixed abrasive polishing was adopted to manufacture LBO crystal for nano precision surface quality because of its deliquescent. Ethyl alcohol was selected as the non-water based slurry solvent and ethanediamine, lactic acid, hydrogen peroxide was added in the slurry as a chemical additive, respectively. Effect of different additives with non-water based slurry on material removal rate, surface topography, microscopic appearances, and surface roughness were investigated in fixed abrasive polishing of LBO crystal. The results show the best surface quality of LBO crystal with surface roughness Sa 8.2 nm and small damages was obtained by non-water based slurry with lactic acid. Non-water based fixed abrasive polishing can achieve nano precision surface quality of LBO crystal with high material removal.

Keywords: Non-water based slurry, LBO crystal, Fixed abrasive polishing, Surface roughness.

Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1100617

References:

[1] C. T. Chen, Y. C. Wu, A. D. Jiang, B. C. Wu, G. M. You, R. K. Li and S. J. Lin "New nonlinear-optical crystal: LiB3O5." J. Opt. Sco. Am., (B6), pp. 616-621. (1989).
[2] Z. Hu, Y. Zhao, Y. Yue and X. Yu "Large LBO crystal growth at 2 kg-level." Journal of Crystal Growth, vol. 335, (1), pp. 133-137. (2011).
[3] Z. G. Hu and Y. C. Wu " Review of the research on the nonlinear optical crystal: LiB3O5." Mater. China, vol. 29, (8), pp. 12-17. (2010).
[4] D. Liao, R. Xie, J. Hou, X. Chen and B. Zhong "A polishing process for nonlinear optical crystal flats based on an annular polyurethane pad." Appl. Surf. Sci., vol. 258, (22), pp. 8552-8557. (2012).
[5] W. Huang, S. Tamilmani, C. Anderson, and S. Raghavan "Material removal and articulate generation during abrasion of copper films using a fixed abrasive pad." IEEE Trans. Semicon. Manu,. vol.17, pp. 525-530. (2004).
[6] B. Gillman and S. Jacobs "Bound-abrasive polishers for optical glass." Appl. Opt., vol. 37, pp. 3498-3505. (1998).
[7] X. Wang and X. Zhang "Theoretical study on removal rate and surface roughness in grinding a RB-SiC mirror with a fixed abrasive." Appl. opt., vol. 48, pp.904-910. (2009).
[8] B.-J. Cho, H.-M. Kim, R. Manivannan, D.-J. Moon and J.-G. Park "On the mechanism of material removal by fixed abrasive lapping of various glass substrates." Wear, vol. 302. (2013).
[9] J. Li, P. Gao, Y. W. Zhu, B. Li, Y. L. Sun and D. W. Zuo "Research on subsurface damage after abrasives and fixed-abrasive lapping of K9 glass." Key Eng. Mater., vol. 487, pp. 253-256. (2011).
[10] J. Li, B. Li, Z. Hu, Y. Zhu and D. Zuo "Optimization of FAP in Nano Machining Process." Integrated Ferroelectrics, vol. 152, (1), pp. 43-50. (2014).
[11] J. Li, B. Li, Z. Hu, Y. Zhu and D. Zuo "Optimization of Fixed Abrasive Polishing Slurry for LiB3O5 Crystal." J Chin Ceram Soc, vol. 41, (6), pp. 789-796.(in Chinese). (2013).
[12] S. Wang, Y. Liu, X. Niu and B. Tan "Slurry and processing technique of CLBO crystal." Trans. Nonferrous Met. Soc. china, vol. 16, (Supplement 2), pp. s692~s695. (2006).
[13] Y. Tian, Z. Zhong, S. Lai, Y. Ang "Development of fixed abrasive chemical mechanical polishing process for glass disk substrates." Int J Adv Manuf Technol, vol. 68, (5-8), pp. 993-1000.(2013).
[14] J. Li, Y. Liu, Y. Pan, X. Lu "Chemical roles on Cu-Slurry interface during copper chemical mechanical planarization." Appl Surf Sci, vol. 293, pp. 287-292.(2014).
[15] J. Li, Y. W. Zhu, D. W. Zuo, K. Lin and M. Li "Fixed abrasive lapping and polishing of hard brittle materials." Key Eng. Mater., vol. 426-427, pp. 589-592. (2010).
[16] J. Li, Y. W. Zhu, D. W. Zuo, Y. Zhu and C. T. Chen "Optimization of polishing with Taguchi method for LBO crystal in CMP." J. Mater. Sci. Technol., vol. 25, (5), pp. 703-707. (2009).