**Commenced**in January 2007

**Frequency:**Monthly

**Edition:**International

**Paper Count:**30455

##### Longitudinal Vibration of a Micro-Beam in a Micro-Scale Fluid Media

**Authors:**
S. Hossainpour,
M. Ghanbari,
G. Rezazadeh

**Abstract:**

In this paper, longitudinal vibration of a micro-beam in micro-scale fluid media has been investigated. The proposed mathematical model for this study is made up of a micro-beam and a micro-plate at its free end. An AC voltage is applied to the pair of piezoelectric layers on the upper and lower surfaces of the micro-beam in order to actuate it longitudinally. The whole structure is bounded between two fixed plates on its upper and lower surfaces. The micro-gap between the structure and the fixed plates is filled with fluid. Fluids behave differently in micro-scale than macro, so the fluid field in the gap has been modeled based on micro-polar theory. The coupled governing equations of motion of the micro-beam and the micro-scale fluid field have been derived. Due to having non-homogenous boundary conditions, derived equations have been transformed to an enhanced form with homogenous boundary conditions. Using Galerkin-based reduced order model**,** the enhanced equations have been discretized over the beam and fluid domains and solve simultaneously in order to obtain force response of the micro-beam. Effects of micro-polar parameters of the fluid as characteristic length scale, coupling parameter and surface parameter on the response of the micro-beam have been studied.

**Keywords:**
MEMS,
Galerkin Method,
micro-polar theory,
micro-fluid

**Digital Object Identifier (DOI):**
doi.org/10.5281/zenodo.1474267

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