Search results for: error treatment.
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 2595

Search results for: error treatment.

2595 Correction of Frequent English Writing Errors by Using Coded Indirect Corrective Feedback and Error Treatment

Authors: Chaiwat Tantarangsee

Abstract:

The purposes of this study are 1) to study the frequent English writing errors of students registering the course: Reading and Writing English for Academic Purposes II, and 2) to find out the results of writing error correction by using coded indirect corrective feedback and writing error treatments. Samples include 28 2nd year English Major students, Faculty of Education, Suan Sunandha Rajabhat University. Tool for experimental study includes the lesson plan of the course; Reading and Writing English for Academic Purposes II, and tool for data collection includes 4 writing tests of short texts. The research findings disclose that frequent English writing errors found in this course comprise 7 types of grammatical errors, namely Fragment sentence, Subject-verb agreement, Wrong form of verb tense, Singular or plural noun endings, Run-ons sentence, Wrong form of verb pattern and Lack of parallel structure. Moreover, it is found that the results of writing error correction by using coded indirect corrective feedback and error treatment reveal the overall reduction of the frequent English writing errors and the increase of students’ achievement in the writing of short texts with the significance at .05.

Keywords: Coded indirect corrective feedback, error correction, error treatment, frequent English writing errors.

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2594 Correction of Frequent English Writing Errors by Using Coded Indirect Corrective Feedback and Error Treatment: The Case of Reading and Writing English for Academic Purposes II

Authors: Chaiwat Tantarangsee

Abstract:

The purposes of this study are 1) to study the frequent English writing errors of students registering the course: Reading and Writing English for Academic Purposes II, and 2) to find out the results of writing error correction by using coded indirect corrective feedback and writing error treatments. Samples include 28 2nd year English Major students, Faculty of Education, Suan Sunandha Rajabhat University. Tool for experimental study includes the lesson plan of the course; Reading and Writing English for Academic Purposes II, and tool for data collection includes 4 writing tests of short texts. The research findings disclose that frequent English writing errors found in this course comprise 7 types of grammatical errors, namely Fragment sentence, Subject-verb agreement, Wrong form of verb tense, Singular or plural noun endings, Run-ons sentence, Wrong form of verb pattern and Lack of parallel structure. Moreover, it is found that the results of writing error correction by using coded indirect corrective feedback and error treatment reveal the overall reduction of the frequent English writing errors and the increase of students’ achievement in the writing of short texts with the significance at .05.

Keywords: Coded indirect corrective feedback, error correction, and error treatment.

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2593 Approximation for Average Error Probability of BPSK in the Presence of Phase Error

Authors: Yeonsoo Jang, Dongweon Yoon, Ki Ho Kwon, Jaeyoon Lee, Wooju Lee

Abstract:

Phase error in communications systems degrades error performance. In this paper, we present a simple approximation for the average error probability of the binary phase shift keying (BPSK) in the presence of phase error having a uniform distribution on arbitrary intervals. For the simple approximation, we use symmetry and periodicity of a sinusoidal function. Approximate result for the average error probability is derived, and the performance is verified through comparison with simulation result.

Keywords: Average error probability, Phase shift keying, Phase error

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2592 A Survey of 2nd Year Students’ Frequent English Writing Errors and the Effects of Participatory Error Correction Process

Authors: Chaiwat Tantarangsee

Abstract:

The purposes of this study are 1) to study the effects of participatory error correction process and 2) to find out the students’ satisfaction of such error correction process. This study is a Quasi Experimental Research with single group, in which data is collected 5 times preceding and following 4 experimental studies of participatory error correction process including providing coded indirect corrective feedback in the students’ texts with error treatment activities. Samples include 52 2nd year English Major students, Faculty of Humanities and Social Sciences, Suan Sunandha Rajabhat University. Tool for experimental study includes the lesson plan of the course; Reading and Writing English for Academic Purposes II, and tools for data collection include 5 writing tests of short texts and a questionnaire. Based on formative evaluation of the students’ writing ability prior to and after each of the 4 experiments, the research findings disclose the students’ higher scores with statistical difference at 0.00. Moreover, in terms of the effect size of such process, it is found that for mean of the students’ scores prior to and after the 4 experiments; d equals 0.6801, 0.5093, 0.5071, and 0.5296 respectively. It can be concluded that participatory error correction process enables all of the students to learn equally well and there is improvement in their ability to write short texts. Finally the students’ overall satisfaction of the participatory error correction process is in high level (Mean = 4.39, S.D. = 0.76).

Keywords: Coded indirect corrective feedback, participatory error correction process, error treatment.

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2591 Effects of Manufacture and Assembly Errors on the Output Error of Globoidal Cam Mechanisms

Authors: Shuting Ji, Yueming Zhang, Jing Zhao

Abstract:

The output error of the globoidal cam mechanism can be considered as a relevant indicator of mechanism performance, because it determines kinematic and dynamical behavior of mechanical transmission. Based on the differential geometry and the rigid body transformations, the mathematical model of surface geometry of the globoidal cam is established. Then we present the analytical expression of the output error (including the transmission error and the displacement error along the output axis) by considering different manufacture and assembly errors. The effects of the center distance error, the perpendicular error between input and output axes and the rotational angle error of the globoidal cam on the output error are systematically analyzed. A globoidal cam mechanism which is widely used in automatic tool changer of CNC machines is applied for illustration. Our results show that the perpendicular error and the rotational angle error have little effects on the transmission error but have great effects on the displacement error along the output axis. This study plays an important role in the design, manufacture and assembly of the globoidal cam mechanism.

Keywords: Globoidal cam mechanism, manufacture error, transmission error, automatic tool changer.

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2590 Performance Evaluation of Complex Valued Neural Networks Using Various Error Functions

Authors: Anita S. Gangal, P. K. Kalra, D. S. Chauhan

Abstract:

The backpropagation algorithm in general employs quadratic error function. In fact, most of the problems that involve minimization employ the Quadratic error function. With alternative error functions the performance of the optimization scheme can be improved. The new error functions help in suppressing the ill-effects of the outliers and have shown good performance to noise. In this paper we have tried to evaluate and compare the relative performance of complex valued neural network using different error functions. During first simulation for complex XOR gate it is observed that some error functions like Absolute error, Cauchy error function can replace Quadratic error function. In the second simulation it is observed that for some error functions the performance of the complex valued neural network depends on the architecture of the network whereas with few other error functions convergence speed of the network is independent of architecture of the neural network.

Keywords: Complex backpropagation algorithm, complex errorfunctions, complex valued neural network, split activation function.

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2589 Application of Adaptive Neuro-Fuzzy Inference Systems Technique for Modeling of Postweld Heat Treatment Process of Pressure Vessel Steel ASTM A516 Grade 70

Authors: Omar Al Denali, Abdelaziz Badi

Abstract:

The ASTM A516 Grade 70 steel is a suitable material used for the fabrication of boiler pressure vessels working in moderate and lower temperature services, and it has good weldability and excellent notch toughness. The post-weld heat treatment (PWHT) or stress-relieving heat treatment has significant effects on avoiding the martensite transformation and resulting in high hardness, which can lead to cracking in the heat-affected zone (HAZ). An adaptive neuro-fuzzy inference system (ANFIS) was implemented to predict the material tensile strength of PWHT experiments. The ANFIS models presented excellent predictions, and the comparison was carried out based on the mean absolute percentage error between the predicted values and the experimental values. The ANFIS model gave a Mean Absolute Percentage Error of 0.556%, which confirms the high accuracy of the model.

Keywords: Prediction, post-weld heat treatment, adaptive neuro-fuzzy inference system, ANFIS, mean absolute percentage error.

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2588 Topology Preservation in SOM

Authors: E. Arsuaga Uriarte, F. Díaz Martín

Abstract:

The SOM has several beneficial features which make it a useful method for data mining. One of the most important features is the ability to preserve the topology in the projection. There are several measures that can be used to quantify the goodness of the map in order to obtain the optimal projection, including the average quantization error and many topological errors. Many researches have studied how the topology preservation should be measured. One option consists of using the topographic error which considers the ratio of data vectors for which the first and second best BMUs are not adjacent. In this work we present a study of the behaviour of the topographic error in different kinds of maps. We have found that this error devaluates the rectangular maps and we have studied the reasons why this happens. Finally, we suggest a new topological error to improve the deficiency of the topographic error.

Keywords: Map lattice, Self-Organizing Map, topographic error, topology preservation.

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2587 Design of Digital Differentiator to Optimize Relative Error

Authors: Vinita V. Sondur, Vilas B. Sondur, Narasimha H. Ayachit

Abstract:

It is observed that the Weighted least-square (WLS) technique, including the modifications, results in equiripple error curve. The resultant error as a percent of the ideal value is highly non-uniformly distributed over the range of frequencies for which the differentiator is designed. The present paper proposes a modification to the technique so that the optimization procedure results in lower maximum relative error compared to the ideal values. Simulation results for first order as well as higher order differentiators are given to illustrate the excellent performance of the proposed method.

Keywords: Differentiator, equiripple, error distribution, relative error.

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2586 Dispersed Error Control based on Error Filter Design for Improving Halftone Image Quality

Authors: Sang-Chul Kim, Sung-Il Chien

Abstract:

The error diffusion method generates worm artifacts, and weakens the edge of the halftone image when the continuous gray scale image is reproduced by a binary image. First, to enhance the edges, we propose the edge-enhancing filter by considering the quantization error information and gradient of the neighboring pixels. Furthermore, to remove worm artifacts often appearing in a halftone image, we add adaptively random noise into the weights of an error filter.

Keywords: Artifact suppression, Edge enhancement, Error diffusion method, Halftone image

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2585 Kinematic Parameter-Independent Modeling and Measuring of Three-Axis Machine Tools

Authors: Yung-Yuan Hsu

Abstract:

The primary objective of this paper was to construct a “kinematic parameter-independent modeling of three-axis machine tools for geometric error measurement" technique. Improving the accuracy of the geometric error for three-axis machine tools is one of the machine tools- core techniques. This paper first applied the traditional method of HTM to deduce the geometric error model for three-axis machine tools. This geometric error model was related to the three-axis kinematic parameters where the overall errors was relative to the machine reference coordinate system. Given that the measurement of the linear axis in this model should be on the ideal motion axis, there were practical difficulties. Through a measurement method consolidating translational errors and rotational errors in the geometric error model, we simplified the three-axis geometric error model to a kinematic parameter-independent model. Finally, based on the new measurement method corresponding to this error model, we established a truly practical and more accurate error measuring technique for three-axis machine tools.

Keywords: Three-axis machine tool, Geometric error, HTM, Error measuring

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2584 Decoder Design for a New Single Error Correcting/Double Error Detecting Code

Authors: M. T. Anwar, P. K. Lala, P. Thenappan

Abstract:

This paper presents the decoder design for the single error correcting and double error detecting code proposed by the authors in an earlier paper. The speed of error detection and correction of a code is largely dependent upon the associated encoder and decoder circuits. The complexity and the speed of such circuits are determined by the number of 1?s in the parity check matrix (PCM). The number of 1?s in the parity check matrix for the code proposed by the authors are fewer than in any currently known single error correcting/double error detecting code. This results in simplified encoding and decoding circuitry for error detection and correction.

Keywords: Decoder, Hsiao code, Parity Check Matrix, Syndrome Pattern.

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2583 Calibration of the Radical Installation Limit Error of the Accelerometer in the Gravity Gradient Instrument

Authors: Danni Cong, Meiping Wu, Xiaofeng He, Junxiang Lian, Juliang Cao, Shaokuncai, Hao Qin

Abstract:

Gravity gradient instrument (GGI) is the core of the gravity gradiometer, so the structural error of the sensor has a great impact on the measurement results. In order not to affect the aimed measurement accuracy, limit error is required in the installation of the accelerometer. In this paper, based on the established measuring principle model, the radial installation limit error is calibrated, which is taken as an example to provide a method to calculate the other limit error of the installation under the premise of ensuring the accuracy of the measurement result. This method provides the idea for deriving the limit error of the geometry structure of the sensor, laying the foundation for the mechanical precision design and physical design.

Keywords: Gravity gradient sensor, radial installation limit error, accelerometer, uniaxial rotational modulation.

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2582 Analysis of Bit Error Rate Improvement in MFSK Communication Link

Authors: O. P. Sharma, V. Janyani, S. Sancheti

Abstract:

Data rate, tolerable bit error rate or frame error rate and range & coverage are the key performance requirement of a communication link. In this paper performance of MFSK link is analyzed in terms of bit error rate, number of errors and total number of data processed. In the communication link model proposed, which is implemented using MATLAB block set, an improvement in BER is observed. Different parameters which effects and enables to keep BER low in M-ary communication system are also identified.

Keywords: Additive White Gaussian Noise (AWGN), Bit Error Rate (BER), Frequency Shift Keying (FSK), Orthogonal Signaling.

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2581 High Capacity Reversible Watermarking through Interpolated Error Shifting

Authors: Hae-Yeoun Lee

Abstract:

Reversible watermarking that not only protects the copyright but also preserve the original quality of the digital content have been intensively studied. In particular, the demand for reversible watermarking has increased. In this paper, we propose a reversible watermarking scheme based on interpolation-error shifting and error pre-compensation. The intensity of a pixel is interpolated from the intensities of neighboring pixels, and the difference histogram between the interpolated and the original intensities is obtained and modified to embed the watermark message. By restoring the difference histogram, the embedded watermark is extracted and the original image is recovered by compensating for the interpolation error. The overflow and underflow are prevented by error pre-compensation. To show the performance of the method, the proposed algorithm is compared with other methods using various test images.

Keywords: Reversible watermarking, High capacity, High quality, Interpolated error shifting, Error pre-compensation.

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2580 Reducing Power in Error Correcting Code using Genetic Algorithm

Authors: Heesung Lee, Joonkyung Sung, Euntai Kim

Abstract:

This paper proposes a method which reduces power consumption in single-error correcting, double error-detecting checker circuits that perform memory error correction code. Power is minimized with little or no impact on area and delay, using the degrees of freedom in selecting the parity check matrix of the error correcting codes. The genetic algorithm is employed to solve the non linear power optimization problem. The method is applied to two commonly used SEC-DED codes: standard Hamming and odd column weight Hsiao codes. Experiments were performed to show the performance of the proposed method.

Keywords: Error correcting codes, genetic algorithm, non-linearpower optimization, Hamming code, Hsiao code.

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2579 Unequal Error Protection for Region of Interest with Embedded Zerotree Wavelet

Authors: T. Hirner, J. Polec

Abstract:

This paper describes a new method of unequal error protection (UEP) for region of interest (ROI) with embedded zerotree wavelet algorithm (EZW). ROI technique is important in applications with different parts of importance. In ROI coding, a chosen ROI is encoded with higher quality than the background (BG). Unequal error protection of image is provided by different coding techniques. In our proposed method, image is divided into two parts (ROI, BG) that consist of more important bytes (MIB) and less important bytes (LIB). The experimental results verify effectiveness of the design. The results of our method demonstrate the comparison of the unequal error protection (UEP) of image transmission with defined ROI and the equal error protection (EEP) over multiple noisy channels.

Keywords: embedded zerotree wavelet (EZW), equal error protection (EEP), region of interest (ROI), RS code, unequal error protection (UEP)

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2578 Calibration of Time-Skew Error in a M-Channel Time-Interleaved Analog-to-Digital Converter

Authors: Yu-Sheng Lee, Qi An

Abstract:

Offset mismatch, gain mismatch, and time-skew error between time-interleaved channels limit the performance of time-interleaved analog-to-digital converters (TIADC). This paper focused on the time-skew error. A new technique for calibrating time-skew error in M-channels TIADC is described, and simulation results are also presented.

Keywords: Calibration, time-skew error, time-interleavedanalog-to-digital converters.

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2577 Performance Analysis of QS-CDMA Systems

Authors: Cuiran Li, Jianli Xie, Chengshu Li

Abstract:

In the paper, the performance of quasi-synchronous CDMA (QS-CDMA) system, which can allow an increased timing error in synchronized access, is discussed. Average BER performance of the system is analyzed in the condition of different access timing error and different asynchronous users by simulation in AWGN channel. The results show that QS-CDMA system is shown to have great performance gain over the asynchronous system when access timing error is within a few chips and asynchronous users is tolerable. However, with access timing error increasing and asynchronous users increasing, the performance of QS-CDMA will degrade. Also, we can determine the number of tolerable asynchronous users for different access timing error by simulation figures.

Keywords: Code-division multiple access, Quasi-SynchronousCDMA, Access timing error

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2576 Packing and Covering Radii of Linear Error-Block Codes

Authors: Rabiˆı DARITI, El Mamoun SOUIDI

Abstract:

Linear error-block codes are a natural generalization of linear error correcting codes. The purpose of this paper is to generalize some results on the packing and the covering radii to the error-block case. We study their properties when a code undergoes some specific modifications and combinations with another code. We give a few bounds on the packing and the covering radii of these codes.

Keywords: Linear error-block codes, π-distance, Correction capacity, Packing radius, Covering radius.

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2575 Grating Scale Thermal Expansion Error Compensation for Large Machine Tools Based on Multiple Temperature Detection

Authors: Wenlong Feng, Zhenchun Du, Jianguo Yang

Abstract:

To decrease the grating scale thermal expansion error, a novel method which based on multiple temperature detection is proposed. Several temperature sensors are installed on the grating scale and the temperatures of these sensors are recorded. The temperatures of every point on the grating scale are calculated by interpolating between adjacent sensors. According to the thermal expansion principle, the grating scale thermal expansion error model can be established by doing the integral for the variations of position and temperature. A novel compensation method is proposed in this paper. By applying the established error model, the grating scale thermal expansion error is decreased by 90% compared with no compensation. The residual positioning error of the grating scale is less than 15μm/10m and the accuracy of the machine tool is significant improved.

Keywords: Thermal expansion error of grating scale, error compensation, machine tools, integral method.

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2574 A New Quadrature Rule Derived from Spline Interpolation with Error Analysis

Authors: Hadi Taghvafard

Abstract:

We present a new quadrature rule based on the spline interpolation along with the error analysis. Moreover, some error estimates for the reminder when the integrand is either a Lipschitzian function, a function of bounded variation or a function whose derivative belongs to Lp are given. We also give some examples to show that, practically, the spline rule is better than the trapezoidal rule.

Keywords: Quadrature, Spline interpolation, Trapezoidal rule, Numericalintegration, Error analysis.

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2573 Error Estimates for Calculated Glomerular Filtration Rates

Authors: Simon Brown

Abstract:

Glomerular filtration rate (GFR) is a measure of kidney function. It is usually estimated from serum concentrations of cystatin C or creatinine although there has been considerable debate in the literature about (i) the best equation to use and (ii) the variability in the correlation between the concentrations of creatinine and cystatin C. The equations for GFR can be written in a general form and from these I calculate the error of the GFR estimates associated with analyte measurement error. These show that the error of the GFR estimates is such that it is not possible to distinguish between the equations over much of the concentration range of either analyte. The general forms of the equations are also used to derive an expression for the concentration of cystatin C as a function of the concentration of creatinine. This equation shows that these analyte concentrations are not linearly related. Clinical reports of cystatin C and creatinine concentration are consistent with the expression derived.

Keywords: creatinine, cystatin C, error analysis, glomerularfiltration rate, measurement error.

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2572 Error Correction Method for 2D Ultra-Wideband Indoor Wireless Positioning System Using Logarithmic Error Model

Authors: Phornpat Chewasoonthorn, Surat Kwanmuang

Abstract:

Indoor positioning technologies have been evolved rapidly. They augment the Global Positioning System (GPS) which requires line-of-sight to the sky to track the location of people or objects. In this study, we developed an error correction method for an indoor real-time location system (RTLS) based on an ultra-wideband (UWB) sensor from Decawave. Multiple stationary nodes (anchor) were installed throughout the workspace. The distance between stationary and moving nodes (tag) can be measured using a two-way-ranging (TWR) scheme. The result has shown that the uncorrected ranging error from the sensor system can be as large as 1 m. To reduce ranging error and thus increase positioning accuracy, we present an online correction algorithm using the Kalman filter. The results from experiments have shown that the system can reduce ranging error down to 5 cm.

Keywords: Indoor positioning, ultra-wideband, error correction, Kalman filter.

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2571 Straightness Error Compensation Servo-system for Single-axis Linear Motor Stage

Authors: M. S. Kang, D. H. Kim, J. S. Yoon, B. S. Park, J. K. Lee

Abstract:

Since straightness error of linear motor stage is hardly dependent upon machining accuracy and assembling accuracy, there is limit on maximum realizable accuracy. To cope with this limitation, this paper proposed a servo system to compensate straightness error of a linear motor stage. The servo system is mounted on the slider of the linear motor stage and moves in the direction of the straightness error so as to compensate the error. From position dependency and repeatability of the straightness error of the slider, a feedforward compensation control is applied to the platform servo control. In the consideration of required fine positioning accuracy, a platform driven by an electro-magnetic actuator is suggested and a sliding mode control was applied. The effectiveness of the sliding mode control was verified along with some experimental results.

Keywords: Linear Motor Stage, Straightness Error, Friction, Sliding Mode Control.

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2570 A Design of Fractional-Order PI Controller with Error Compensation

Authors: Mazidah Tajjudin, Norhashim Mohd Arshad, Ramli Adnan

Abstract:

Fractional-order controller was proven to perform better than the integer-order controller. However, the absence of a pole at origin produced marginal error in fractional-order control system. This study demonstrated the enhancement of the fractionalorder PI over the integer-order PI in a steam temperature control. The fractional-order controller was cascaded with an error compensator comprised of a very small zero and a pole at origin to produce a zero steady-state error for the closed-loop system. Some modification on the error compensator was suggested for different order fractional integrator that can improve the overall phase margin.

Keywords: Fractional-order PI, Ziegler-Nichols tuning, Oustaloup's Recursive Approximation, steam temperature control.

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2569 Operational risks Classification for Information Systems with Service-Oriented Architecture (Including Loss Calculation Example)

Authors: Irina Pyrlina

Abstract:

This article presents the results of a study conducted to identify operational risks for information systems (IS) with service-oriented architecture (SOA). Analysis of current approaches to risk and system error classifications revealed that the system error classes were never used for SOA risk estimation. Additionally system error classes are not normallyexperimentally supported with realenterprise error data. Through the study several categories of various existing error classifications systems are applied and three new error categories with sub-categories are identified. As a part of operational risks a new error classification scheme is proposed for SOA applications. It is based on errors of real information systems which are service providers for application with service-oriented architecture. The proposed classification approach has been used to classify SOA system errors for two different enterprises (oil and gas industry, metal and mining industry). In addition we have conducted a research to identify possible losses from operational risks.

Keywords: Enterprise architecture, Error classification, Oil&Gas and Metal&Mining industries, Operational risks, Serviceoriented architecture

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2568 Application of EEG Wavelet Power to Prediction of Antidepressant Treatment Response

Authors: Dorota Witkowska, Paweł Gosek, Lukasz Swiecicki, Wojciech Jernajczyk, Bruce J. West, Miroslaw Latka

Abstract:

In clinical practice, the selection of an antidepressant often degrades to lengthy trial-and-error. In this work we employ a normalized wavelet power of alpha waves as a biomarker of antidepressant treatment response. This novel EEG metric takes into account both non-stationarity and intersubject variability of alpha waves. We recorded resting, 19-channel EEG (closed eyes) in 22 inpatients suffering from unipolar (UD, n=10) or bipolar (BD, n=12) depression. The EEG measurement was done at the end of the short washout period which followed previously unsuccessful pharmacotherapy. The normalized alpha wavelet power of 11 responders was markedly different than that of 11 nonresponders at several, mostly temporoparietal sites. Using the prediction of treatment response based on the normalized alpha wavelet power, we achieved 81.8% sensitivity and 81.8% specificity for channel T4.

Keywords: Alpha waves, antidepressant, treatment outcome, wavelet.

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2567 A Finite Precision Block Floating Point Treatment to Direct Form, Cascaded and Parallel FIR Digital Filters

Authors: Abhijit Mitra

Abstract:

This paper proposes an efficient finite precision block floating point (BFP) treatment to the fixed coefficient finite impulse response (FIR) digital filter. The treatment includes effective implementation of all the three forms of the conventional FIR filters, namely, direct form, cascaded and par- allel, and a roundoff error analysis of them in the BFP format. An effective block formatting algorithm together with an adaptive scaling factor is pro- posed to make the realizations more simple from hardware view point. To this end, a generic relation between the tap weight vector length and the input block length is deduced. The implementation scheme also emphasises on a simple block exponent update technique to prevent overflow even during the block to block transition phase. The roundoff noise is also investigated along the analogous lines, taking into consideration these implementational issues. The simulation results show that the BFP roundoff errors depend on the sig- nal level almost in the same way as floating point roundoff noise, resulting in approximately constant signal to noise ratio over a relatively large dynamic range.

Keywords: Finite impulse response digital filters, Cascade structure, Parallel structure, Block floating point arithmetic, Roundoff error.

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2566 The Analysis of Radial/Axial Error Motion on a Precision Rotation Stage

Authors: Jinho Kim, Dongik Shin, Deokwon Yun, Changsoo Han

Abstract:

Rotating stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor state of manufactured goods. To evaluate and improve the performance of such precision rotary stage, unessential movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of a rotating stage with high precision capacitive sensors. To obtain the radial error motion from T.I.R (Total Indicated Reading) of radial direction, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have defined and measured the sensitivity of positioning error to the five error motions.

Keywords: Donaldson's reversal methods, Estler face motionreversal method, Error motion, sensitivity, T.I.R (Total IndicatedReading).

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