Search results for: B. G. Sheeparamatti

Authors: B. G. Sheeparamatti, Prashant Hanasi, Vanita Abbigeri

Abstract:

The objective of this work is to carryout critical comparison of different actuation mechanisms like electrostatic, thermal, piezoelectric, and magnetic with reference to a micro cantilever. The relevant parameters like force generated, displacement are compared in actuation methods. With these results, helps in choosing the best actuation method for a particular application. In this study, Comsol/Multiphysics software is used. Modeling and simulation is done by considering the micro cantilever of same dimensions as an actuator using all the above mentioned actuation techniques. In addition to their small size, micro actuators consume very little power and are capable of accurate results. In this work, a comparison of actuation mechanisms is done to decide the efficient system in micro domain.

Keywords: Actuation techniques, microswitch, micro actuator, microsystems.

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Authors: B. G. Sheeparamatti, J. S. Kadadevarmath

Abstract:

Microcantilevers are the basic MEMS devices, which can be used as sensors, actuators and electronics can be easily built into them. The detection principle of microcantilever sensors is based on the measurement of change in cantilever deflection or change in its resonance frequency. The objective of this work is to explore the analogies between mechanical and electrical equivalent of microcantilever beams. Normally scientists and engineers working in MEMS use expensive software like CoventorWare, IntelliSuite, ANSYS/Multiphysics etc. This paper indicates the need of developing electrical equivalent of the MEMS structure and with that, one can have a better insight on important parameters, and their interrelation of the MEMS structure. In this work, considering the mechanical model of microcantilever, equivalent electrical circuit is drawn and using force-voltage analogy, it is analyzed with circuit simulation software. By doing so, one can gain access to powerful set of intellectual tools that have been developed for understanding electrical circuits Later the analysis is performed using ANSYS/Multiphysics - software based on finite element method (FEM). It is observed that both mechanical and electrical domain results for a rectangular microcantlevers are in agreement with each other.

Keywords: Electrical equivalent circuit analogy, FEM analysis, micro cantilevers, micro sensors.

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