Search results for: force disassembly.

Authors: Nina Danišová, Roman Ružarovský, Karol Velíšek

Abstract:

In this paper is described a new conception of the Cartesian robot for automated assembly and also disassembly process. The advantage of this conception is the utilization the Cartesian assembly robot with its all peripheral automated devices for assembly of the assembled product. The assembly product in the end of the lifecycle can be disassembled with the same Cartesian disassembly robot with the use of the same peripheral automated devices and equipment. It is a new approach to problematic solving and development of the automated assembly systems with respect to lifecycle management of the assembly product and also assembly system with Cartesian robot. It is also important to develop the methodical process for design of automated assembly and disassembly system with Cartesian robot. Assembly and disassembly system use the same Cartesian robot input and output devices, assembly and disassembly units in one workplace with different application. Result of design methodology is the verification and proposition of real automated assembly and disassembly workplace with Cartesian robot for known verified model of assembled actuator.

Keywords: Cartesian robot, design methodology, assembly, disassembly, pneumatic

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Authors: Tao Yin, Zeqiang Zhang, Wei Liang, Yanqing Zeng, Yu Zhang

Abstract:

To accelerate the remanufacturing process of electronic waste products, this study designs a partial disassembly line with the multi-robotic station to effectively dispose of excessive wastes. The multi-robotic partial disassembly line is a technical upgrade to the existing manual disassembly line. Balancing optimization can make the disassembly line smoother and more efficient. For partial disassembly line balancing with the multi-robotic station (PDLBMRS), a mixed-integer programming model (MIPM) considering the robotic efficiency differences is established to minimize cycle time, energy consumption and hazard index and to calculate their optimal global values. Besides, an enhanced NSGA-II algorithm (HNSGA-II) is proposed to optimize PDLBMRS efficiently. Finally, MIPM and HNSGA-II are applied to an actual mixed disassembly case of two types of computers, the comparison of the results solved by GUROBI and HNSGA-II verifies the correctness of the model and excellent performance of the algorithm, and the obtained Pareto solution set provides multiple options for decision-makers.

Keywords: Waste disposal, disassembly line balancing, multi-robot station, robotic efficiency difference, HNSGA-II.

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Authors: Yuan-Jye Tseng, Fang-Yu Yu, Feng-Yi Huang

Abstract:

A green design for assembly model is presented to integrate design evaluation and assembly and disassembly sequence planning by evaluating the three activities in one integrated model. For an assembled product, an assembly sequence planning model is required for assembling the product at the start of the product life cycle. A disassembly sequence planning model is needed for disassembling the product at the end. In a green product life cycle, it is important to plan how a product can be disassembled, reused, or recycled, before the product is actually assembled and produced. Given a product requirement, there may be several design alternative cases to design the same product. In the different design cases, the assembly and disassembly sequences for producing the product can be different. In this research, a new model is presented to concurrently evaluate the design and plan the assembly and disassembly sequences. First, the components are represented by using graph based models. Next, a particle swarm optimization (PSO) method with a new encoding scheme is developed. In the new PSO encoding scheme, a particle is represented by a position matrix defining an assembly sequence and a disassembly sequence. The assembly and disassembly sequences can be simultaneously planned with an objective of minimizing the total of assembly costs and disassembly costs. The test results show that the presented method is feasible and efficient for solving the integrated design evaluation and assembly and disassembly sequence planning problem. An example product is implemented and illustrated in this paper.

Keywords: green design, assembly and disassembly sequence planning, green design for assembly, particle swarm optimization.

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Authors: Obinna K. Ihesiulor, Krishna Shankar, Paul Smith, Alan Fien

Abstract:

Excessive fretting wear at the taper-trunnion junction (trunnionosis) apparently contributes to the high failure rates of hip implants. Implant wear and corrosion lead to the release of metal particulate debris and subsequent release of metal ions at the tapertrunnion surface. This results in a type of metal poisoning referred to as metallosis. The consequences of metal poisoning include; osteolysis (bone loss), osteoarthritis (pain), aseptic loosening of the prosthesis and revision surgery. Follow up after revision surgery, metal debris particles are commonly found in numerous locations. Background: A stable connection between the femoral ball head (taper) and stem (trunnion) is necessary to prevent relative motions and corrosion at the taper junction. Hence, the importance of component assembly cannot be over-emphasized. Therefore, the aim of this study is to determine the influence of head-stem junction assembly by press fitting and the subsequent disengagement/disassembly on the connection strength between the taper ball head and stem. Methods: CoCr femoral heads were assembled with High stainless hydrogen steel stem (trunnion) by Push-in i.e. press fit; and disengaged by pull-out test. The strength and stability of the two connections were evaluated by measuring the head pull-out forces according to ISO 7206-10 standards. Findings: The head-stem junction strength linearly increases with assembly forces.

Keywords: Wear, modular hip prosthesis, taper head-stem, force assembly, force disassembly.

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Authors: D. Gouwanda, S. M. N. A. Senanayake

Abstract:

This paper presents a real time force sensing instrument that is designed for human gait analysis purposes. It is capable of recording and monitoring ground reaction forces exerted by human foot during various activities such as walking, running and jumping in real time. In overall, force sensing mat mainly consists of three elements: the force sensing mat, signal conditioning circuit and data acquisition device. Force sensing mat is the mat that contains an array of force sensing elements. To control and process the incoming signal from the force sensing mat, Force-Logger and Force-Reloader are developed using National Instrument Labview. This paper describes the architecture of the force sensing mat, signal conditioning circuit and the real time streaming of the incoming data from the force sensing mat. Additionally, a preliminary experiment dataset is presented in this paper.

Keywords: Force platform, force sensing resistor, human gait analysis.

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Authors: Zhi Sheng Lin, K. C. G. Ong, Lado Riannevo Chandra, Bee Hong Angeline Tan, Chat Tim Tam, Sze Dai Pang

Abstract:

Design for Disassembly (DfD) aims to reuse the structural components instead of demolition followed by recycling of the demolition debris. This concept preserves the invested embodied energy of materials, thus reducing inputs of new embodied energy during materials reprocessing or remanufacturing. Both analytical and experimental research on a proposed DfD beam-column connection for use in residential apartments is currently investigated at the National University of Singapore in collaboration with the Housing and Development Board of Singapore. The present study reports on the results of a numerical analysis of the proposed connection utilizing finite element analysis. The numerical model was calibrated and validated by comparison against experimental results. Results of a parametric study will also be presented and discussed.

Keywords: Design for Disassembly (DfD), finite element analysis, parametric study.

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Authors: Darwin Gouwanda, S. M. N. Arosha Senanayake, M. M. Danushka Ranjana Marasinghe, Mervin Chandrapal, Jeya Mithra Kumar, Tung Mun Hon, Yulius

Abstract:

This paper presents a real time force sensing instrument that is designed for human gait analysis purposes. This instrument mainly consists of three main elements: the force sensing mat, signal conditioning and switching circuit and data acquisition device. In order to control and to process the incoming signals from the force sensing mat, Force-Logger and Force-Reloader program are developed using Labview 8.0. This paper describes the architecture of the force sensing mat, signal conditioning and switching circuit and the real time streaming of the incoming data from the force sensing mat.

Keywords: Force platform, Force sensing resistor, human gait analysis

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Authors: M.A. Kamely, M.Y. Noordin

Abstract:

A judicious choice of insert material, tool geometry and cutting conditions can make hard turning produce better surfaces than grinding. In the present study, an attempt has been made to investigate the effect of cutting tool materials on cutting forces (feed force, thrust force and cutting force) in finish hard turning of AISI D2 cold work tool steel. In conclusion of the results obtained with a constant depth of cut and feed rate, it is important to note that cutting force is directly affected by cutting tool material.

Keywords: hard turning, cutting force, cutting tool materials, mixed ceramic, cbn

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Authors: A. Niknejad, G. H. Liaghat, A. H. Behravesh, H. Moslemi Naeini

Abstract:

In this paper, a semi empirical formula is presented based on the experimental results to predict the first pick (maximum force) value in the instantaneous folding force- axial distance diagram of a square column. To achieve this purpose, the maximum value of the folding force was assumed to be a function of the average folding force. Using the experimental results, the maximum value of the force necessary to initiate the first fold in a square column was obtained with respect to the geometrical quantities and material properties. Finally, the results obtained from the semi empirical relation in this paper, were compared to the experimental results which showed a good correlation.

Keywords: Honeycomb, folding force, square column, aluminum, axial loading.

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Authors: Zarita Zainuddin, Mohammed Mahmod Shuaib, Ibtesam M. Abu-Sulyman

Abstract:

The social force model which belongs to the microscopic pedestrian studies has been considered as the supremacy by many researchers and due to the main feature of reproducing the self-organized phenomena resulted from pedestrian dynamic. The Preferred Force which is a measurement of pedestrian-s motivation to adapt his actual velocity to his desired velocity is an essential term on which the model was set up. This Force has gone through stages of development: first of all, Helbing and Molnar (1995) have modeled the original force for the normal situation. Second, Helbing and his co-workers (2000) have incorporated the panic situation into this force by incorporating the panic parameter to account for the panic situations. Third, Lakoba and Kaup (2005) have provided the pedestrians some kind of intelligence by incorporating aspects of the decision-making capability. In this paper, the authors analyze the most important incorporations into the model regarding the preferred force. They make comparisons between the different factors of these incorporations. Furthermore, to enhance the decision-making ability of the pedestrians, they introduce additional features such as the familiarity factor to the preferred force to let it appear more representative of what actually happens in reality.

Keywords: Pedestrian movement, social force model, preferredforce, familiarity.

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Authors: Dunwen Zuo, Yongfang Deng, Bo Song

Abstract:

An attempt is made here to measure the forces of three directions, under conditions of different feed speeds, different tilt angles of tool and without or with the pin on the tool, by using octagonal ring dynamometer in the AA2024 aluminum FSJ (Friction Stir Joining) process, and investigate how four main factors influence forces in the FSJ process. It is found that, high feed speed lead to small feed force and small lateral force, but high feed speed leads to large feed force in the stable joining stage of process. As the rotational speed increasing, the time of axial force drop from the maximum to the minimum required increased in the push-up process. In the stable joining stage, the rotational speed has little effect on the feed force; large rotational speed leads to small lateral force and axial force. The maximum axial force increases as the tilt angle of tool increases at the downward movement stage. At the moment of start feeding, as tilt angle of tool increases, the amplitudes of the axial force increasing become large. In the stable joining stage, with the increase of tilt angle of tool, the axial force is increased, the lateral force is decreased, and the feed force almost unchanged. The tool with pin will decrease axial force in the downward movement stage. The feed force and lateral force will increase, but the axial force will reduced in the stable joining stage by using the tool with pin compare to by using the tool without pin.

Keywords: FSJ, force factor, AA2024, friction stir joining.

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Authors: Vahid Sabermand, Yousef Hojjat, Majid Hasanzadeh

Abstract:

This paper contains 2 main parts. In the first part of paper we simulated and studied three types of electrode patterns used in various industries for suspension and handling of the semiconductor and glass and we selected the best pattern by evaluating the electrostatic force, which was comb pattern electrode. In the second part we investigated the parameters affecting the amount of electrostatic force such as the gap between surface and electrode (g), the electrode width (w), the gap between electrodes (t), the surface permittivity and electrode length and methods of improvement of adhesion force by changing these values.

Keywords: Electrostatic force, electrostatic adhesion, electrostatic chuck, electrostatic application in industry, Electroadhesive grippers.

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Authors: A. Niknejad, G. H. Liaghat, A. H. Behravesh, H. Moslemi Naeini

Abstract:

In this paper, a theoretical formula is presented to predict the instantaneous folding force of the first fold creation in a square column under axial loading. Calculations are based on analysis of “Basic Folding Mechanism" introduced by Wierzbicki and Abramowicz. For this purpose, the sum of dissipated energy rate under bending around horizontal and inclined hinge lines and dissipated energy rate under extensional deformations are equated to the work rate of the external force on the structure. Final formula obtained in this research, reasonably predicts the instantaneous folding force of the first fold creation versus folding distance and folding angle and also predicts the instantaneous folding force instead of the average value. Finally, according to the calculated theoretical relation, instantaneous folding force of the first fold creation in a square column was sketched versus folding distance and was compared to the experimental results which showed a good correlation.

Keywords: Instantaneous force, Folding force, Honeycomb, Square column.

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Authors: Shiuh-Jer Huang, Yu-Chi Liu, Su-Hai Hsiang

Abstract:

A novel low-cost impedance control structure is proposed for monitoring the contact force between end-effector and environment without installing an expensive force/torque sensor. Theoretically, the end-effector contact force can be estimated from the superposition of each joint control torque. There have a nonlinear matrix mapping function between each joint motor control input and end-effector actuating force/torques vector. This new force control structure can be implemented based on this estimated mapping matrix. First, the robot end-effector is manipulated to specified positions, then the force controller is actuated based on the hall sensor current feedback of each joint motor. The model-free fuzzy sliding mode control (FSMC) strategy is employed to design the position and force controllers, respectively. All the hardware circuits and software control programs are designed on an Altera Nios II embedded development kit to constitute an embedded system structure for a retrofitted Mitsubishi 5 DOF robot. Experimental results show that PI and FSMC force control algorithms can achieve reasonable contact force monitoring objective based on this hardware control structure.

Keywords: Robot, impedance control, fuzzy sliding mode control, contact force estimator.

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Authors: Jiří Primas, Michal Malík, Darina Jašíková, Václav Kopecký

Abstract:

When a high DC voltage is applied to a capacitor with strongly asymmetrical electrodes, it generates a mechanical force that affects the whole capacitor. This phenomenon is most likely to be caused by the motion of ions generated around the smaller of the two electrodes and their subsequent interaction with the surrounding medium. A method to measure this force has been devised and used. A formula describing the force has also been derived. After comparing the data gained through experiments with those acquired using the theoretical formula, a difference was found above a certain value of current. This paper also gives reasons for this difference.

Keywords: Capacitor with asymmetrical electrodes, Electricalfield, Mechanical force, Motion of ions.

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Authors: W. R. Li, J. K. Xia, R. Q. Peng, Z. Y. Guo, L. Jiang

Abstract:

According to 3D magnetic circuit of the transverse flux PM linear machine, distribution law is presented, and analytical expression of axial end flux leakage is derived using numerical method. Maxwell stress tensor is used to solve detent force of mover. A 3D finite element model of the transverse flux PM machine is built to analyze the flux distribution and detent force. Experimental results of the prototype verified the validity of axial end flux leakage and detent force theoretical derivation, the research on axial end flux leakage and detent force provides a valuable reference to other types of linear machine.

Keywords: Transverse flux PM linear machine, flux distribution, axial end flux leakage, detent force.

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Authors: Wang Zhan-Xi, Zhang Yi-Ming, Chen Hang, Wang Gang

Abstract:

Manual polishing has problems such as high labor intensity, low production efficiency and difficulty in guaranteeing the consistency of polishing quality. The use of robot polishing instead of manual polishing can effectively avoid these problems. Polishing force directly affects the quality of polishing, so accurate tracking and control of polishing force is one of the most important conditions for improving the accuracy of robot polishing. The traditional force control strategy is difficult to adapt to the strong coupling of force control and position control during the robot polishing process. Therefore, based on the analysis of force-based impedance control and position-based impedance control, this paper proposed a type of adaptive controller. Based on force feedback control of active compliance control, the controller can adaptively estimate the stiffness and position of the external environment and eliminate the steady-state force error produced by traditional impedance control. The simulation results of the model show that the adaptive controller has good adaptability to changing environmental positions and environmental stiffness, and can accurately track and control polishing force.

Keywords: robot polishing, force feedback, impedance control, adaptive control

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Authors: R. Hashemi, M.H.Kargarnovin

Abstract:

This paper presents the identification of the impact force acting on a simply supported beam. The force identification is an inverse problem in which the measured response of the structure is used to determine the applied force. The identification problem is formulated as an optimization problem and the genetic algorithm is utilized to solve the optimization problem. The objective function is calculated on the difference between analytical and measured responses and the decision variables are the location and magnitude of the applied force. The results from simulation show the effectiveness of the approach and its robustness vs. the measurement noise and sensor location.

Keywords: Genetic Algorithm, Inverse problem, Optimization, Vibration.

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Authors: Osama A. Marzouk

Abstract:

We propose a reduced-ordermodel for the instantaneous hydrodynamic force on a cylinder. The model consists of a system of two ordinary differential equations (ODEs), which can be integrated in time to yield very accurate histories of the resultant force and its direction. In contrast to several existing models, the proposed model considers the actual (total) hydrodynamic force rather than its perpendicular or parallel projection (the lift and drag), and captures the complete force rather than the oscillatory part only. We study and provide descriptions of the relationship between the model parameters, evaluated utilizing results from numerical simulations, and the Reynolds number so that the model can be used at any arbitrary value within the considered range of 100 to 500 to provide accurate representation of the force without the need to perform timeconsuming simulations and solving the partial differential equations (PDEs) governing the flow field.

Keywords: reduced-order model, wake oscillator, nonlinear, ODEsystem

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Authors: Weifeng Wang, Guoqing Huang, Xianwei Zeng

Abstract:

The nearly 21-year-old Jiujiang Bridge, which is suffering from uneven line shape, constant great downwarping of the main beam and cracking of the box girder, needs reinforcement and cable adjustment. It has undergone cable adjustment for twice with incomplete data. Therefore, the initial internal force state of the Jiujiang Bridge is identified as the key for the cable adjustment project. Based on parameter identification by means of static force test data, this paper suggests determining the initial internal force state of the cable-stayed bridge according to the cable force-displacement relationship parameter identification method. That is, upon measuring the displacement and the change in cable forces for twice, one can identify the parameters concerned by means of optimization. This method is applied to the cable adjustment, replacement and reinforcement project for the Jiujiang Bridge as a guidance for the cable adjustment and reinforcement project of the bridge.

Keywords: Cable-stayed bridge, cable force-displacement, parameter identification, internal force state

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Authors: Zeinab Galavani, Reza Rezaei-Nasirabad, Rasoul Sadighi-Bonabi

Abstract:

Using a force balanced translational-radial dynamics, phase space of the moving single bubble sonoluminescence (m- SBSL) in 85% wt sulfuric acid has been numerically calculated. This phase space is compared with that of single bubble sonoluminescence (SBSL) in pure water which has been calculated by using the mere radial dynamics. It is shown that in 85% wt sulfuric acid, in a general agreement with experiment, the bubble-s positional instability threshold lays under the shape instability threshold. At the onset of spatial instability of moving sonoluminescing (SL) bubble in 85% wt sulfuric acid, temporal effects of the hydrodynamic force on the bubble translational-radial dynamics have been investigated. The appearance of non-zero history force on the moving SL bubble is because of proper condition which was produced by high viscosity of acid. Around the moving bubble collapse due to the rapid contraction of the bubble wall, the inertial based added mass force overcomes the viscous based history force and induces acceleration on the bubble translational motion.

Keywords: Bjerknes force, History force, Reynolds number, Sonoluminescence.

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Authors: Fashad Amini, Lin Li

Abstract:

High performance turf reinforcement mat (HPTRM) is one of the most advanced flexible armoring technologies for severe erosion challenges. The effect of turbulence on the slope stability of an earthen levee strengthened by high performance turf reinforcement mat (HPTRM) is investigated in this study for combined storm surge and wave overtopping conditions. The results show that turbulence has strong influence on the slope stability during the combined storm surge and wave overtopping conditions. Among the surge height, peak wave force and turbulent force. The turbulent force has the ability to stabilize the earthen levee at the large wave force the turbulent force has strongest effect on the FS. The surge storm acts as an independent force on the slope stability of the earthen levee. It just adds to the effects of the turbulent force and wave force on the slope stability of HPTRM strengthened levee.

Keywords: Slope stability, strength reduction method, HPTRM, levee, overtopping.

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Authors: Océane Grosset, Charles Pézerat, Jean-Hugh Thomas, Frédéric Ablitzer

Abstract:

This paper presents a method to take into account the fluid-structure coupling into an inverse method, the Force Analysis Technique (FAT). The FAT method, also called RIFF method (Filtered Windowed Inverse Resolution), allows to identify the force distribution from local vibration field. In order to only identify the external force applied on a structure, it is necessary to quantify the fluid-structure coupling, especially in naval application, where the fluid is heavy. This method can be decomposed in two parts, the first one consists in identifying the fluid-structure coupling and the second one to introduced it in the FAT method to reconstruct the external force. Results of simulations on a plate coupled with a cavity filled with water are presented.

Keywords: Fluid-structure coupling, inverse methods, naval, vibrations.

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Authors: Nicolay Zarutskiy, Roman Bulkin

Abstract:

The paper deals with the existing methods of force-torque sensor calibration with a number of components from one to six, analyzed their advantages and disadvantages, the necessity of introduction of a calibration method. Calibration method and its constructive realization are also described here. A calibration method allows performing automated force-torque sensor calibration both with selected components of the main vector of forces and moments and with complex loading. Thus, two main advantages of the proposed calibration method are achieved: the automation of the calibration process and universality.

Keywords: Automation, calibration, calibration device, calibration method, force-torque sensors.

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Authors: Jiří Primas, Michal Malík, Darina Jašíková, Václav Kopecký

Abstract:

When a high DC voltage is applied to a capacitor with strongly asymmetrical electrodes, it generates a mechanical force that affects the whole capacitor. This is caused by the motion of ions generated around the smaller of the two electrodes and their subsequent interaction with the surrounding medium. If one of the electrodes is heated, it changes the conditions around the capacitor and influences the process of ionisation, thus changing the value of the generated force. This paper describes these changes and gives reasons behind them. Further the experimental results are given as proof of the ionic mechanism of the phenomenon.

Keywords: Capacitor with asymmetrical electrodes, Generated force, Heated electrode, High voltage.

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Authors: Hassam Ahmed, Yuanzhi Liu, Yassine Selami, Wei Tao, Hui Zhao

Abstract:

The purpose of this research is to develop a real time axial force measurement system for a smart bearing through the use of strain-gauges, whereby the data acquisition is performed by an Arduino microcontroller due to its easy manipulation and low-cost. The measured signal is acquired and then discretized using a Wheatstone Bridge and an Analog-Digital Converter (ADC) respectively. For bearing monitoring, a real time monitoring system based on Internet of things (IoT) and Bluetooth were developed. Experimental tests were performed on a bearing within a force range up to 600 kN. The experimental results show that there is a proportional linear relationship between the applied force and the output voltage, and the error R squared is within 0.9878 based on the regression analysis.

Keywords: Bearing, force measurement, IoT, strain gauge.

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Authors: E. Hemmati Vand, R. H. Oskouei, T. N. Chakherlou

Abstract:

In this paper, the details of an experimental method to measure the clamping force value at bolted connections due to application of wrenching torque to tighten the nut have been presented. A simplified bolted joint including a holed plate with a single bolt was considered to carry out the experiments. This method was designed based on Hooke-s law by measuring compressive axial strain of a steel bush placed between the nut and the plate. In the experimental procedure, the values of clamping force were calculated for seven different levels of applied torque, and this process was repeated three times for each level of the torque. Moreover, the effect of lubrication of threads on the clamping value was studied using the same method. In both conditions (dry and lubricated threads), relation between the torque and the clamping force have been displayed in graphs.

Keywords: Clamping force, Bolted joints, Experimental method, Lubrication.

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Authors: M. Jahanandish, Gh. Sadeghian, M. H. Daneshvar, M. H. Jahanandish

Abstract:

The amount of resistance of a particular medium like soil to the moving objects is the interest of many areas in science. These include soil mechanics, geotechnical engineering, powder mechanics etc. Knowledge of drag force is also used for estimating the amount of momentum of fired objects like bullets. This paper focuses on measurement of drag force of sand on a cone when it moves at a low constant speed. A 30-degree apex angle cone has been used for this purpose. The study consisted of both loose and dense conditions of the soil. The applied speed has been in the range of 0.1 to 10 mm/min. The results indicate that the required force is basically independent of the cone speed; but, it is very dependent on the material densification and confining stress.

Keywords: Drag force, sand, moving speed, friction angle, densification, confining stress.

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Authors: N. Z. Azlan, H. Yamaura

Abstract:

This paper presents the Function Approximation Technique (FAT) based adaptive impedance control for a robotic finger. The force based impedance control is developed so that the robotic finger tracks the desired force while following the reference position trajectory, under unknown environment position and uncertainties in finger parameters. The control strategy is divided into two phases, which are the free and contact phases. Force error feedback is utilized in updating the uncertain environment position during contact phase. Computer simulations results are presented to demonstrate the effectiveness of the proposed technique.

Keywords: Adaptive impedance control, force based impedance control, force control, Function Approximation Technique (FAT), unknown environment position.

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Authors: Zone-Ching Lin, Hao-Yuan Jheng, Shih-Hung Ma

Abstract:

The present paper proposes using atomic force microscopy (AFM) and the concept of specific down force energy (SDFE) to establish a method for fabricating and cutting the burr for Y shape nanochannel on silicon (Si) substrate. For fabricating Y shape nanochannel, it first makes the experimental cutting path planning for fabricating Y shape nanochannel until the fifth cutting layer. Using the constant down force by AFM and SDFE theory and following the experimental cutting path planning, the cutting depth and width of each pass of Y shape nanochannel can be predicted by simulation. The paper plans the path for cutting the burr at the edge of Y shape nanochannel. Then, it carries out cutting the burr along the Y nanochannel edge by using a smaller down force. The height of standing burr at the edge is required to be below the set value of 0.54 nm. The results of simulation and experiment of fabricating and cutting the burr for Y shape nanochannel is further compared.

Keywords: Atomic force microscopy, nanochannel, specific down force energy, Y shape, burr, silicon.

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