Search results for: frequency converter

Authors: Azza M. Anis, M. M. Abutaleb, Hani F. Ragai, M. I. Eladawy

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This paper presents the characterization and design of a capacitive pressure sensor with LC-based 0.35 µm CMOS readout circuit. SPICE is employed to evaluate the characteristics of the readout circuit and COMSOL multiphysics structural analysis is used to simulate the behavior of the pressure sensor. The readout circuit converts the capacitance variation of the pressure sensor into the frequency output. Simulation results show that the proposed pressure sensor has output frequency from 2.50 to 2.28 GHz in a pressure range from 0.1 to 2 MPa almost linearly. The sensitivity of the frequency shift with respect to the applied pressure load is 0.11 GHz/MPa.

Keywords: CMOS LC-based oscillator, micro pressure sensor, silicon carbide

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Authors: A. Kamath, Z. X. Chen, C. J. Gu, F. Zheng, X. P. Wang, N. Singh, G-Q. Lo

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In this paper we use low frequency noise analysis to understand and map the current conduction path in a multi gate junctionless FinFET.  The device used in this study behaves as a gated resistor and shows excellent short channel effect suppression due to its multi gate structure. Generally for a bulk conduction device like the junctionless device studied in this work, the low frequency noise can be modelled using the mobility fluctuation model; however for this device we can also see the effect of carrier fluctuations on the LFN characteristic. The noise characteristic at different gate bias and also the possible location of the traps is explained.

Keywords: LFN analysis, junctionless, Current conduction path, FinFET.

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Authors: M. Y. Ismail, M. Inam

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This paper presents the design and analysis of Liquid Crystal (LC) based tunable reflectarray antenna with slot embedded patch element configurations within X-band frequency range. The slots are shown to modify the surface current distribution on the patch element of reflectarray which causes the resonant patch element to provide different resonant frequencies depending on the slot dimensions. The simulated results are supported and verified by waveguide scattering parameter measurements of different reflectarray unit cells. Different rectangular slots on patch element have been fabricated and a change in resonant frequency from 10.46GHz to 8.78GHz has been demonstrated as the width of the rectangular slot is varied from 0.2W to 0.6W. The rectangular slot in the center of the patch element has also been utilized for the frequency tunable reflectarray antenna design based on K-15 Nematic LC. For the active reflectarray antenna design, a frequency tunability of 1.2% from 10GHz to 9.88GHz has been demonstrated with a dynamic phase range of 103° provided by the measured scattering parameter results. Time consumed by liquid crystals for reconfiguration, which is one of the drawback of LC based design, has also been disused in this paper.

Keywords: Liquid crystal, tunable reflectarray, frequency tunability, dynamic phase range.

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Authors: Joshi Manohar. V., Sujatha. P., Anjaneyulu K. S. R

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The range of the output power is a very important and evident limitation of two-level inverters. In order to overcome this disadvantage, multilevel inverters are introduced. Recently, Cascade H-Bridge inverters have emerged as one of the popular converter topologies used in numerous industrial applications. The modulation switching strategies such as phase shifted carrier based Pulse Width Modulation (PWM) technique and Stair case modulation with Selective Harmonic Elimination (SHE) PWM technique are generally used. NR method is used to solve highly non linear transcendental equations which are formed by SHEPWM method. Generally NR method has a drawback of requiring good initial guess but in this paper a new approach is implemented for NR method with any random initial guess. A three phase CHB 11-level inverter is chosen for analysis. MATLAB/SIMULINK programming environment and harmonic profiles are compared. Finally this paper presents a method at fundamental switching frequency with least % THDV.

Keywords: Cascade H-bridge 11- level Inverter, NR method, Phase shifted carrier based pulse width modulation (PSCPWM), Selective Harmonic Elimination Pulse Width Modulation (SHEPWM), Total Harmonic Distortion (%THDv).

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Authors: Hazem M. El-Bakry, Qiangfu Zhao

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Recently, fast neural networks for object/face detection were presented in [1-3]. The speed up factor of these networks relies on performing cross correlation in the frequency domain between the input image and the weights of the hidden layer. But, these equations given in [1-3] for conventional and fast neural networks are not valid for many reasons presented here. In this paper, correct equations for cross correlation in the spatial and frequency domains are presented. Furthermore, correct formulas for the number of computation steps required by conventional and fast neural networks given in [1-3] are introduced. A new formula for the speed up ratio is established. Also, corrections for the equations of fast multi scale object/face detection are given. Moreover, commutative cross correlation is achieved. Simulation results show that sub-image detection based on cross correlation in the frequency domain is faster than classical neural networks.

Keywords: Conventional Neural Networks, Fast Neural Networks, Cross Correlation in the Frequency Domain.

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Authors: Barenten Suciu, Yoshiki Tsuji

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In this paper, a theoretical investigation on the dynamic characteristics of one degree of freedom vibration system equipped with inerter of variable inertance, is presented. Differential equation of movement was solved under proper initial conditions in the case of free undamped/damped vibration, considered in the absence/presence of the inerter in the mechanical system. Influence of inertance on the amplitude of vibration, phase angle, natural frequency, damping ratio, and logarithmic decrement was clarified. It was mainly found that the inerter decreases the natural frequency of the undamped system and also of the damped system if the damping ratio is below 0.707. On the other hand, the inerter increases the natural frequency of the damped system if the damping ratio exceeds 0.707. Results obtained in this work are useful for the adequate design of inerters.

Keywords: One degree of freedom vibration system, inerter, parallel connection, variable inertance, frequency control, damping.

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Authors: Somkait Udomhunsakul

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In this paper, a multi-focus image fusion method using Spatial Frequency Measurements (SFM) and Wavelet Packet was proposed. The proposed fusion approach, firstly, the two fused images were transformed and decomposed into sixteen subbands using Wavelet packet. Next, each subband was partitioned into sub-blocks and each block was identified the clearer regions by using the Spatial Frequency Measurement (SFM). Finally, the recovered fused image was reconstructed by performing the Inverse Wavelet Transform. From the experimental results, it was found that the proposed method outperformed the traditional SFM based methods in terms of objective and subjective assessments.

Keywords: Multi-focus image fusion, Wavelet Packet, Spatial Frequency Measurement.

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Authors: Khaldon Lweesy, Luay Fraiwan, Christoph Maier, Hartmut Dickhaus

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This paper describes a new method for extracting the fetal heart rate (fHR) and the fetal heart rate variability (fHRV) signal non-invasively using abdominal maternal electrocardiogram (mECG) recordings. The extraction is based on the fundamental frequency (Fourier-s) theorem. The fundamental frequency of the mother-s electrocardiogram signal (fo-m) is calculated directly from the abdominal signal. The heart rate of the fetus is usually higher than that of the mother; as a result, the fundamental frequency of the fetal-s electrocardiogram signal (fo-f) is higher than that of the mother-s (fo-f > fo-m). Notch filters to suppress mother-s higher harmonics were designed; then a bandpass filter to target fo-f and reject fo-m is implemented. Although the bandpass filter will pass some other frequencies (harmonics), we have shown in this study that those harmonics are actually carried on fo-f, and thus have no impact on the evaluation of the beat-to-beat changes (RR intervals). The oscillations of the time-domain extracted signal represent the RR intervals. We have also shown in this study that zero-to-zero evaluation of the periods is more accurate than the peak-to-peak evaluation. This method is evaluated both on simulated signals and on different abdominal recordings obtained at different gestational ages.

Keywords: Aabdominal ECG, fetal heart rate variability, frequency harmonics, fundamental frequency.

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Authors: S. Doyle, G. A. Aggidis

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Wave energy converter technologies continue to show good progress in worldwide research. One of the most researched technologies, the Oscillating Water Column (OWC), is arguably one of the most popular categories within the converter technologies due to its robustness, simplicity and versatility. However, the versatility of the OWC is still largely untapped with most deployments following similar trends with respect to applications and operating systems. As the competitiveness of the energy market continues to increase, the demand for wave energy technologies to be innovative also increases. For existing wave energy technologies, this requires identifying areas to diversify for lower costs of energy with respect to applications and synergies or integrated systems. This paper provides a review of all OWCs systems integrated into alternative applications in the past and present. The aspects and variation in their design, deployment and system operation are discussed. Particular focus is given to the Multi-OWCs (M-OWCs) and their great potential to increase capture on a larger scale, especially in synergy applications. It is made clear that these steps need to be taken in order to make wave energy a competitive and viable option in the renewable energy mix as progression to date shows that stand alone single function devices are not economical. Findings reveal that the trend of development is moving toward these integrated applications in order to reduce the Levelised Cost of Energy (LCOE) and will ultimately continue in this direction in efforts to make wave energy a competitive option in the renewable energy mix.

Keywords: Ocean energy, wave energy, oscillating water column, renewable energy, review.

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Authors: Siri-Orn Champatong

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This research paper was aimed to examine the relationship between visitors’ attitude towards the service marketing mix and visitors’ frequency of visit to Bangpu Recreation Centre. Based on a large and uncalculated population, the number of samples was calculated according to the formula to obtain a total of 385 samples. In collecting the samples, systematic random sampling was applied and by using of a Likert five-scale questionnaire for, a total of 21 days to collect the needed information. Mean, Standard Deviation, and Pearson’s basic statistical correlations were utilized in analyzing the data. This study discovered a high level of visitors’ attitude product and service of Bangpu Recreation Centre, price, place, promotional activities, people who provided service and physical evidence of the centre. The attitude towards process of service was discovered to be at a medium level. Additionally, the finding of an examination of a relationship between visitors’ attitude towards service marketing mix and visitors’ frequency of visit to Bangpu Recreation Centre presented that product and service, people, physical evidence and process of service provision showed a relationship with the visitors’ frequency of visit to the centre per year.

Keywords: Frequency of Visit, Visitor, Service Marketing Mix, Bangpu Recreation Centre.

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Authors: Wittawat Wasusathien, Samran Santalunai, Thanaset Thosdeekoraphat, Chanchai Thongsopa

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This paper presents breast cancer detection by observing the specific absorption rate (SAR) intensity for identification tumor location, the tumor is identified in coordinates (x,y,z) system. We examined the frequency between 4-8 GHz to look for the most appropriate frequency. Results are simulated in frequency 4-8 GHz, the model overview include normal breast with 50 mm radian, 5 mm diameter of tumor, and ultra wideband (UWB) bowtie antenna. The models are created and simulated in CST Microwave Studio. For this simulation, we changed antenna to 5 location around the breast, the tumor can be detected when an antenna is close to the tumor location, which the coordinate of maximum SAR is approximated the tumor location. For reliable, we experiment by random tumor location to 3 position in the same size of tumor and simulation the result again by varying the antenna position in 5 position again, and it also detectable the tumor position from the antenna that nearby tumor position by maximum value of SAR, which it can be detected the tumor with precision in all frequency between 4-8 GHz.

Keywords: Specific absorption rate (SAR), ultra wideband (UWB), coordinates and cancer detection

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Authors: Tahmine. V. Moghaddam, N. Bigdeli, K. Afshar

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To achieve the desired specifications of gain and phase margins for plants with time-delay that stabilized with FO-PID controller a lead compensator is designed. At first the range of controlled system stability based on stability boundary criteria is determined. Using stability boundary locus method in frequency domain the fractional order controller parameters are tuned and then with drawing bode diagram in frequency domain accessing to desired gain and phase margin are shown. Numerical examples are given to illustrate the shapes of the stabilizing region and to show the design procedure.

Keywords: Fractional controller, Lead compensator, Stabilityregions, Stability boundary locus

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Authors: Ágnes Bogárdi-Mészöly, Takeshi Hashimoto, Shohei Yokoyama, Hiroshi Ishikawa

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The spread of Web 2.0 has caused user-generated content explosion. Users can tag resources to describe and organize them. Tag clouds provide rough impression of relative importance of each tag within overall cloud in order to facilitate browsing among numerous tags and resources. The goal of our paper is to enrich visualization of tag clouds. A font distribution algorithm has been proposed to calculate a novel metric based on frequency and content, and to classify among classes from this metric based on power law distribution and percentages. The suggested algorithm has been validated and verified on the tag cloud of a real-world thesis portal.

Keywords: Tag cloud, font distribution algorithm, frequency-based, content-based, power law.

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Authors: Hwan Su Jung, Ahn Jun Gil, Jong Tae Kim

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Power management techniques are necessary to save power in the microprocessor. By changing the frequency and/or operating voltage of processor, DVFS can control power consumption. In this paper, we perform a case study to find optimal power state transition for DVFS. We propose the equation to find the optimal ratio between executions of states while taking into account the deadline of processing time and the power state transition delay overhead. The experiment is performed on the Cortex-M4 processor, and average 6.5% power saving is observed when DVFS is applied under the deadline condition.

Keywords: Deadline, Dynamic Voltage Frequency Scaling, Power State Transition.

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Authors: Najm M. Al-Hosiny

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We theoretically investigate the effects of frequency detuning and injection power on the nonlinear dynamics of DFB lasers under dual external optical injection.

Keywords: Optical injection, DFB laser, frequency detuning, injection power.

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Authors: A.Muthuramalingam, S.Himavathi

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Space Vector Modulation (SVM) is an optimum Pulse Width Modulation (PWM) technique for an inverter used in a variable frequency drive applications. It is computationally rigorous and hence limits the inverter switching frequency. Increase in switching frequency can be achieved using Neural Network (NN) based SVM, implemented on application specific chips. This paper proposes a neural network based SVM technique for a Voltage Source Inverter (VSI). The network proposed is independent of switching frequency. Different architectures are investigated keeping the total number of neurons constant. The performance of the inverter is compared for various switching frequencies for different architectures of NN based SVM. From the results obtained, the network with minimum resource and appropriate word length is identified. The bit precision required for this application is identified. The network with 8-bit precision is implemented in the IC XCV 400 and the results are presented. The performance of NN based general purpose SVM with higher bit precision is discussed.

Keywords: NN based SVM, FPGA Implementation, LayerMultiplexing, NN structure and Resource Reduction, PerformanceEvaluation

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Authors: Ho-Jun Jo, Wook-Won Kim, Yong-Sung Kim, Jin-O Kim

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The application of ESS (Energy Storage Systems) in the future grids has been the solution of the microgrid. However, high investment costs necessitate accurate modeling and control strategy of ESS to justify its economic viability and further underutilization. Therefore, the reasonable control strategy for ESS which is subjected to generator and usage helps to curtail the cost of investment and operation costs. The rated frequency in power system is decreased when the load is increasing unexpectedly; hence the thermal power is operated at the capacity of only its 95% for the Governor Free (GF) to adjust the frequency as reserve (5%) in practice. The ESS can be utilized with governor at the same time for the frequency response due to characteristic of its fast response speed and moreover, the cost of ESS is declined rapidly to the reasonable price. This paper presents the ESS control strategy to extend usage of the ESS taken account into governor’s ramp rate and reduce the governor’s intervention as well. All results in this paper are simulated by MATLAB.

Keywords: Micro grid, energy storage systems, ramp rate, control strategy.

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Authors: Yong-An Jung, Young-Hwan You

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This paper suggests an improved integer frequency offset (IFO) estimation scheme using P1 symbol for orthogonal frequency division multiplexing (OFDM) based the second generation terrestrial digital video broadcasting (DVB-T2) system. Proposed IFO estimator is designed by a low-complexity blind IFO estimation scheme, which is implemented with complex additions. Also, we propose active carriers (ACs) selection scheme in order to prevent performance degradation in blind IFO estimation. The simulation results show that under the AWGN and TU6 channels, the proposed method has low complexity than conventional method and almost similar performance in comparison with the conventional method.

Keywords: OFDM, DVB-T2, P1 symbol, ACs, IFO.

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Authors: Tomáš Urbanec

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Paper presents simple sixport principle and its frequency bandwidth. The novel multisixport approach is presented with its possibilities, typical parameters and frequency bandwidth. Practical implementation is shown with its measurement parameters and calibration. The bandwidth circa 1:100 is obtained.

Keywords: microwave measurement, sixport, VNA, wideband.

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Authors: Wipassorn Vinicchayakul, Pichaya Supanakoon, Sathaporn Promwong

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A human’s hand localization is revised by using radar cross section (RCS) measurements with a minimum root mean square (RMS) error matching algorithm on a touchless keypad mock-up model. RCS and frequency transfer function measurements are carried out in an indoor environment on the frequency ranged from 3.0 to 11.0 GHz to cover federal communications commission (FCC) standards. The touchless keypad model is tested in two different distances between the hand and the keypad. The initial distance of 19.50 cm is identical to the heights of transmitting (Tx) and receiving (Rx) antennas, while the second distance is 29.50 cm from the keypad. Moreover, the effects of Rx angles relative to the hand of human factor are considered. The RCS input parameters are compared with power loss parameters at each frequency. From the results, the performance of the RCS input parameters with the second distance, 29.50 cm at 3 GHz is better than the others.

Keywords: Radar cross section (RCS), fingerprint-based localization, minimum root mean square (RMS) error matching algorithm, touchless keypad model.

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Authors: Justin Leo Cheang Loong, Khazaimatol S Subari, Muhammad Kamil Abdullah, Nurul Nadia Ahmad, RosliBesar

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Heart sound is an acoustic signal and many techniques used nowadays for human recognition tasks borrow speech recognition techniques. One popular choice for feature extraction of accoustic signals is the Mel Frequency Cepstral Coefficients (MFCC) which maps the signal onto a non-linear Mel-Scale that mimics the human hearing. However the Mel-Scale is almost linear in the frequency region of heart sounds and thus should produce similar results with the standard cepstral coefficients (CC). In this paper, MFCC is investigated to see if it produces superior results for PCG based human identification system compared to CC. Results show that the MFCC system is still superior to CC despite linear filter-banks in the lower frequency range, giving up to 95% correct recognition rate for MFCC and 90% for CC. Further experiments show that the high recognition rate is due to the implementation of filter-banks and not from Mel-Scaling.

Keywords: Biometric, Phonocardiogram, Cepstral Coefficients, Mel Frequency

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Authors: Frydrysiak M., Zięba J., Tęsiorowski Ł.

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In this paper authors presented the research of textile electroconductive materials, which can be used to construction sensory textronic shirt to breath frequency measurement. The full paper also will present results of measurements carried out on unique measurement stands.

Keywords: Electroconductive fibres, textile sensor, textronic, respiratory rhythm measurement.

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Authors: R. Vetrimurugan, Terry Lim, M. J. Goodson, R. Nagarajan

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This study investigates the cleaning performance of high intensity 360 kHz frequency on removal of nano-dimensional and sub-micron particles from various surfaces, uniformity of the cleaning tank and run to run variation of cleaning process. The uniformity of the cleaning tank was measured by two different methods i.e. 1. ppbTM meter and 2. Liquid Particle Counting (LPC) technique. The result indicates that the energy was distributed more uniformly throughout the entire cleaning vessel even at the corners and edges of the tank when megasonic sweeping technology is applied. The result also shows that rinsing the parts with 360 kHz frequency at final rinse gives lower particle counts, hence higher cleaning efficiency as compared to other frequencies. When megasonic sweeping technology is applied each piezoelectric transducers will operate at their optimum resonant frequency and generates stronger acoustic cavitational force and higher acoustic streaming velocity. These combined forces are helping to enhance the particle removal and at the same time improve the overall cleaning performance. The multiple extractions study was also carried out for various frequencies to measure the cleaning potential and asymptote value.

Keywords: Power distribution, megasonic sweeping, thickness mode transducers, cavitation intensity, particle removal, laser particle counting, nano, submicron.

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Authors: Malka N. Halgamuge, Chathurika D. Abeyratne, Priyan Mendis

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A fundamental model consisting of charged particles moving in free space exposed to alternating and direct current (ACDC) electromagnetic fields is analyzed. Effects of charged particles initial position and initial velocity to cyclotron resonance frequency are observed. Strong effects are observed revealing that effects of electric and magnetic fields on a charged particle in free space varies with the initial conditions. This indicates the frequency where maximum displacement occur can be changed. At this frequency the amplitude of oscillation of the particle displacement becomes unbounded.

Keywords: Cyclotron resonance, electromagnetic fields, particle displacement

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Authors: Subal Kar, Madhuja Ghosh, Amitesh Kumar, Arijit Majumder

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Complementary split-ring resonator (CSRR) loaded microstrip square patch antenna has been optimally designed with the help of high frequency structure simulator (HFSS). The antenna has been fabricated on the basis of the simulation design data and experimentally tested in anechoic chamber to evaluate its gain, bandwidth, efficiency and polarization characteristics. The CSRR loaded microstrip patch antenna has been found to realize significant size miniaturization (to the extent of 24%) compared to the conventional-type microstrip patch antenna both operating at the same frequency (5.2 GHz). The fabricated antenna could realize a maximum gain of 4.17 dB, 10 dB impedance bandwidth of 34 MHz, efficiency 50.73% and with maximum cross-pol of 10.56 dB down at the operating frequency. This practically designed antenna with its miniaturized size is expected to be useful for airborne and space borne applications at microwave frequency.

Keywords: Split ring resonator, metamaterial, CSRR loaded patch antenna, microstrip patch antenna, LC resonator.

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Authors: Ahmed H. Abdullah, Pavel Kroupa

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Globular clusters (GC) are important objects for tracing the early evolution of a galaxy. We study the correlation between the cluster population and the global properties of the host galaxy. We found that the correlation between cluster population (NGC) and the baryonic mass (Mb) of the host galaxy are best described as 10 −5.6038Mb. In order to understand the origin of the U -shape relation between the GC specific frequency (SN) and Mb (caused by the high value of SN for dwarfs galaxies and giant ellipticals and a minimum SN for intermediate mass galaxies≈ 1010M), we derive a theoretical model for the specific frequency (SNth). The theoretical model for SNth is based on the slope of the power-law embedded cluster mass function (β) and different time scale (Δt) of the forming galaxy. Our results show a good agreement between the observation and the model at a certain β and Δt. The model seems able to reproduce higher value of SNth of β = 1.5 at the midst formation time scale.

Keywords: Galaxies, dwarf, globular cluster, specific frequency, formation time scale.

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Authors: S. Z. Sayed Hassen

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The load frequency control problem of power systems has attracted a lot of attention from engineers and researchers over the years. Increasing and quickly changing load demand, coupled with the inclusion of more generators with high variability (solar and wind power generators) on the network are making power systems more difficult to regulate. Frequency changes are unavoidable but regulatory authorities require that these changes remain within a certain bound. Engineers are required to perform the tricky task of adjusting the control system to maintain the frequency within tolerated bounds. It is well known that to minimize frequency variations, a large proportional feedback gain (speed regulation constant) is desirable. However, this improvement in performance using proportional feedback comes about at the expense of a reduced stability margin and also allows some steady-state error. A conventional PI controller is then included as a secondary control loop to drive the steadystate error to zero. In this paper, we propose a robust controller to replace the conventional PI controller which guarantees performance and stability of the power system over the range of variation of the speed regulation constant. Simulation results are shown to validate the superiority of the proposed approach on a simple single-area power system model.

Keywords: Robust control, power system, integral action, minimax LQG control.

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Authors: A. A. Ugla

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The present paper aims to investigate the effects of the welding process parameters and cooling state on the weld bead geometry, mechanical properties and microstructure characteristics for weldments of AISI 304L stainless steel. The welding process was carried out using TIG welding with pulsed/non-pulsed current techniques. The cooling state was introduced as an input parameter to investigate the main effects on the structure morphology and thereby the mechanical property. This paper clarifies microstructure- mechanical property relationship of the welded specimens. In this work, the selected pulse frequency levels were 5-500 Hz in order to study the effect of low and high frequencies on the weldment characteristics using filler metal of ER 308LSi. The key findings of this work clarified that the pulse frequency has a significant effect on the breaking of the dendrite arms during the welding process and so strongly influences on the tensile strength and microhardness. The cooling state also significantly affects on the microstructure texture and thereby, the mechanical properties. The most important factor affects the bead geometry and aspect ratio is the travel speed and pulse frequency.

Keywords: Microstructure, mechanical properties, pulse frequency, high pulse frequency, austenitic stainless steel, TIG welding.

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Authors: N. Promsuwanna, P. Uthansakul, M. Uthansakul

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The Carrier Frequency Offset (CFO) due to timevarying fading channel is the main cause of the loss of orthogonality among OFDM subcarriers which is linked to inter-carrier interference (ICI). Hence, it is necessary to precisely estimate and compensate the CFO. Especially for mobile broadband communications, CFO and channel gain also have to be estimated and tracked to maintain the system performance. Thus, synchronization pilots are embedded in every OFDM symbol to track the variations. In this paper, we present the pilot scheme for both channel and CFO estimation where channel estimation process can be carried out with only one OFDM symbol. Additional, the proposed pilot scheme also provides better performance in CFO estimation comparing with the conventional orthogonal pilot scheme due to the increasing of signal-tointerference ratio.

Keywords: MIMO, OFDM, carrier frequency offset, channel, estimation.

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Authors: Vasudha Hegde, Narendra Chaulagain, H. M. Ravikumar, Sonu Mishra, Siva Yellampalli

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Acoustic sensors are extensively used in recent days not only for sensing and condition monitoring applications but also for small scale energy harvesting applications to power wireless sensor networks (WSN) due to their inherent advantages. The natural frequency of the structure plays a major role in energy harvesting applications since the sensor key element has to operate at resonant frequency. In this paper, circular diaphragm based MEMS acoustic sensor is modelled by Lumped Element Model (LEM) and the natural frequency is compared with the simulated model using Finite Element Method (FEM) tool COMSOL Multiphysics. The sensor has the circular diaphragm of 3000 µm radius and thickness of 30 µm to withstand the high SPL (Sound Pressure Level) and also to withstand the various fabrication steps. A Piezoelectric ZnO layer of thickness of 1 µm sandwiched between two aluminium electrodes of thickness 0.5 µm and is coated on the diaphragm. Further, a channel with radius 3000 µm radius and length 270 µm is connected at the bottom of the diaphragm. The natural frequency of the structure by LEM method is approximately 16.6 kHz which is closely matching with that of simulated structure with suitable approximations.

Keywords: Acoustic sensor, diaphragm based, lumped element modeling, natural frequency, piezoelectric.

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