Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 5

Publications

5 Intelligent Face-Up CMP System Integrated with On-Line Optical Measurements

Authors: Sheng-Ming Huang, Nan-Chyuan Tsai, Chih-Che Lin, Chun-Chi Lin

Abstract:

An innovative design for intelligent Chemical Mechanical Polishing (CMP) system is proposed and verified by experiments in this report. On-line measurement and real-time feedback are integrated to eliminate the shortcomings of traditional approaches, e.g., the batch-to-batch discrepancy of required polishing time, over consumption of chemical slurry, and non-uniformity across the wafer. The major advantage of the proposed method is that the finish of local surface roughness can be consistent, no matter where the inner-ring region or outer-ring region is concerned. Secondly, it is able to eliminate the Edge effect. Conventionally, the interfacial induced stress near the wafer edge is generally much higher than that near the wafer center. At last, by using the proposed intelligent chemical mechanical polishing strategy, the cost of the entire machining cycle can be much reduced while the quality of the finished goods certainly upgraded.

Keywords: Chemical Mechanical Polishing, Active Magnetic Actuator, On-Line Measurement.

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4 Tri-Axis Receiver for Wireless Micro-Power Transmission

Authors: Nan-Chyuan Tsai, Sheng-Liang Hsu

Abstract:

An innovative tri-axes micro-power receiver is proposed. The tri-axes micro-power receiver consists of two sets 3-D micro-solenoids and one set planar micro-coils in which iron core is embedded. The three sets of micro-coils are designed to be orthogonal to each other. Therefore, no matter which direction the flux is present along, the magnetic energy can be harvested and transformed into electric power. Not only dead space of receiving power is mostly reduced, but also transformation efficiency of electromagnetic energy to electric power can be efficiently raised. By employing commercial software, Ansoft Maxwell, the preliminary simulation results verify that the proposed micro-power receiver can efficiently pick up the energy transmitted by magnetic power source. As to the fabrication process, the isotropic etching technique is employed to micro-machine the inverse-trapezoid fillister so that the copper wire can be successfully electroplated. The adhesion between micro-coils and fillister is much enhanced.

Keywords: Wireless Power Transmission, Magnetic Flux, Tri-axes Micro-power Receiver

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3 Design of Electromagnetic Drive Module for Micro-gyroscope

Authors: Nan-Chyuan Tsai, Jiun-Sheng Liou, Chih-Che Lin, Tuan Li

Abstract:

For micro-gyroscopes, the angular rate detection components have to oscillate forwards and backwards alternatively. An innovative design of micro-electromagnetic drive module is proposed to make a Π-type disc reciprocally and efficiently rotate within a certain of angular interval. Twelve Electromagnetic poles enclosing the thin disc are designed to provide the magnetic drive power. Isotropic etching technique is employed to fabricate the high-aspect-ratio trench, so that the contact angle of wire against trench can be increased and the potential defect of cavities and pores within the wire can be prevented. On the other hand, a Π-type thin disc is designed to conduct the pitch motion as an angular excitation, in addition to spinning, is exerted on the gyroscope. The efficacy of the micro-magnetic drive module is verified by the commercial software, Ansoft Maxewll. In comparison with the conventional planar windings in micro-scale systems, the magnetic drive force is increased by 150%.

Keywords: Micro-gyroscope, micro-electromagnetic, micro actuator.

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2 Milling Chatter Prevention by Adaptive Spindle Speed Tuning

Authors: Nan-Chyuan Tsai, Din-Chang Chen, Rong-Mao Lee, Bai-Lu Wang

Abstract:

This paper presents how the real-time chatter prevention can be realized by feedback of acoustic cutting signal, and the efficacy of the proposed adaptive spindle speed tuning algorithm is verified by intensive experimental simulations. A pair of microphones, perpendicular to each other, is used to acquire the acoustic cutting signal resulting from milling chatter. A real-time feedback control loop is constructed for spindle speed compensation so that the milling process can be ensured to be within the stability zone of stability lobe diagram. Acoustic Chatter Signal Index (ACSI) and Spindle Speed Compensation Strategy (SSCS) are proposed to quantify the acoustic signal and actively tune the spindle speed respectively. By converting the acoustic feedback signal into ACSI, an appropriate Spindle Speed Compensation Rate (SSCR) can be determined by SSCS based on real-time chatter level or ACSI. Accordingly, the compensation command, referred to as Added-On Voltage (AOV), is applied to increase/decrease the spindle motor speed. By inspection on the precision and quality of the workpiece surface after milling, the efficacy of the real-time chatter prevention strategy via acoustic signal feedback is further assured.

Keywords: Chatter compensation, Stability lobes, Non-invasivemeasurement.

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1 Enhanced Efficacy of Kinetic Power Transform for High-Speed Wind Field

Authors: Nan-Chyuan Tsai, Chao-Wen Chiang, Bai-Lu Wang

Abstract:

The three-time-scale plant model of a wind power generator, including a wind turbine, a flexible vertical shaft, a Variable Inertia Flywheel (VIF) module, an Active Magnetic Bearing (AMB) unit and the applied wind sequence, is constructed. In order to make the wind power generator be still able to operate as the spindle speed exceeds its rated speed, the VIF is equipped so that the spindle speed can be appropriately slowed down once any stronger wind field is exerted. To prevent any potential damage due to collision by shaft against conventional bearings, the AMB unit is proposed to regulate the shaft position deviation. By singular perturbation order-reduction technique, a lower-order plant model can be established for the synthesis of feedback controller. Two major system parameter uncertainties, an additive uncertainty and a multiplicative uncertainty, are constituted by the wind turbine and the VIF respectively. Frequency Shaping Sliding Mode Control (FSSMC) loop is proposed to account for these uncertainties and suppress the unmodeled higher-order plant dynamics. At last, the efficacy of the FSSMC is verified by intensive computer and experimental simulations for regulation on position deviation of the shaft and counter-balance of unpredictable wind disturbance.

Keywords: Sliding Mode Control, Singular Perturbation, Variable Inertia Flywheel.

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