Search results for: sensor space

Authors: Jung-Ho Moon, Myung-Gon Yoon, Tae Kwon Ha

Abstract:

This paper presents a wireless sensor network protocol for a car parking monitoring system. A wireless sensor network for the purpose is composed of multiple sensor nodes, a sink node, a gateway, and a server. Each of the sensor nodes is equipped with a 3-axis AMR sensor and deployed in the center of a parking space. The sensor node reads its sensor values periodically and transmits the data to the sink node if the current and immediate past sensor values show a difference exceeding a threshold value. The operations of the sink and sensor nodes are described in detail along with flow diagrams. The protocol allows a low-duty cycle operation of the sensor nodes and a flexible adjustment of the threshold value used by the sensor nodes.

Keywords: car parking monitoring, sensor node, wireless sensor network, network protocol

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Authors: Dae Il Kim, Jungho Moon, Tae Yun Chung

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This paper presents a car parking monitoring system using a wireless sensor network. The presented sensor network has a line-shaped topology and adopts a TDMA-based protocol for allowing multi-hop communications. Sensor nodes are deployed in the ground of an outdoor parking lot in such a way that a sensor node monitors a parking space. Each sensor node detects the availability of the associated parking space and transmits the detection result to a sink node via intermediate sensor nodes existing between the source sensor node and the sink node. We evaluate the feasibility of the presented sensor network and the TDMA-based communication protocol through experiments using 11 sensor nodes deployed in a real parking lot. The result shows that the presented car parking monitoring system is robust to changes in the communication environments and efficient for monitoring parking spaces of outdoor parking lots.

Keywords: multi-hop communication, parking monitoring system, TDMA, wireless sensor network

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Authors: Yang Xiong, Hua Cheng

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In this paper, for the basic problem of wireless sensor network topology control and deployment, the Roesser model in rectangular grid sensor networks is presented. In addition, a general constructive realization procedure will be proposed. The procedure enables a distributed implementation of linear systems on a sensor network. A non-trivial example is illustrated.

Keywords: grid sensor networks, Roesser model, state-space realization, multidimensional systems

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Authors: Gagandeep Singh

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The sensor field optimization is a serious issue in WSNs and has been ignored by many researchers. As in numerous real-time sensing fields the sensor nodes on the corners i.e. on the segment boundaries will become lifeless early because no extraordinary safety is presented for them. Accordingly, in this research work the central objective is on the segment based optimization by separating the sensor field between advance and normal segments. The inspiration at the back this sensor field optimization is to extend the time spam when the first sensor node dies. For the reason that in normal sensor nodes which were exist on the borders may become lifeless early because the space among them and the base station is more so they consume more power so at last will become lifeless soon.

Keywords: WSNs, ECRSEP, SEP, field optimization, energy

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Authors: Miroslav Popelka, Jakub Nozicka

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The whole work is based on possibility to use Lego Mindstorms robotics systems to reduce costs. Lego Mindstorms consists of a wide variety of hardware components necessary to simulate, programme and test of robotics systems in practice. To programme algorithm, which simulates space using the ultrasonic sensor, was used development environment supplied with kit. Software Matlab was used to render values afterwards they were measured by ultrasonic sensor. The algorithm created for this paper uses theoretical knowledge from area of signal processing. Data being processed by algorithm are collected by ultrasonic sensor that scans 2D space in front of it. Ultrasonic sensor is placed on moving arm of robot which provides horizontal moving of sensor. Vertical movement of sensor is provided by wheel drive. The robot follows map in order to get correct positioning of measured data. Based on discovered facts it is possible to consider Lego Mindstorm for low-cost and capable kit for real-time modelling.

Keywords: LEGO Mindstorms, ultrasonic sensor, real-time modeling, 2D object, low-cost robotics systems, sensors, Matlab, EV3 Home Edition Software

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Authors: Sheng-Shih Wang, Wei-Ting Wang

Abstract:

This paper designs an intelligent guidance system, based on wireless sensor networks, for efficient parking in parking lots. The proposed system consists of a parking space allocation subsystem, a parking space monitoring subsystem, a driving guidance subsystem, and a vehicle detection subsystem. In the system, we propose a novel and effective virtual coordinate system for sensing and displaying devices to determine the proper vacant parking space and provide the precise guidance to the driver. This study constructs a ZigBee-based wireless sensor network on Arduino platform and implements the prototype of the proposed system using Arduino-based complements. Experimental results confirm that the proposed prototype can not only work well, but also provide drivers the correct parking information.

Keywords: Arduino, parking guidance, wireless sensor network, ZigBee

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Authors: Lei Qi, Rongxin Yan, Lichen Sun

Abstract:

With the increasing of human space activities, the number of space debris has increased dramatically, and the possibility that spacecrafts on orbit are impacted by space debris is growing. A method is of the vital significance to real-time detect and assess spacecraft damage, determine of gas leak accurately, guarantee the life safety of the astronaut effectively. In this paper, acoustic sensor array is used to detect the acoustic signal which emits from the damage of the spacecraft on orbit. Then, we apply the time difference of arrival and beam forming algorithm to locate the damage and leakage. Finally, the extent of the spacecraft damage is evaluated according to the nonlinear ultrasonic method. The result shows that this method can detect the debris impact and the structural damage, locate the damage position, and identify the damage degree effectively. This method can meet the needs of structural damage detection for the spacecraft in-orbit.

Keywords: acoustic sensor array, spacecraft, damage assessment, leakage location

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Authors: Fariborz Ahmadi, Hamid Salehi, Khosrow Karimi

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A sensor network is set of sensor nodes that cooperate together to perform a predefined tasks. The important problem in this network is power consumption. So, in this paper one algorithm based on the eurygaster life is introduced to minimize power consumption by the nodes of these networks. In this method the search space of problem is divided into several partitions and each partition is investigated separately. The evaluation results show that our approach is more efficient in comparison to other evolutionary algorithm like genetic algorithm.

Keywords: evolutionary computation, genetic algorithm, particle swarm optimization, sensor network optimization

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Authors: Mike Dee

Abstract:

Urban public spaces are sutured with a range of surveillance and sensor technologies that claim to enable new forms of ‘data based citizen participation’, but also increase the tendency for ‘function-creep’, whereby vast amounts of data are gathered, stored and analysed in a broad application of urban surveillance. This kind of monitoring and capacity for surveillance connects with attempts by civic authorities to regulate, restrict, rebrand and reframe urban public spaces. A direct consequence of the increasingly security driven, policed, privatised and surveilled nature of public space is the exclusion or ‘unfavourable inclusion’ of those considered flawed and unwelcome in the ‘spectacular’ consumption spaces of many major urban centres. In the name of urban regeneration, programs of securitisation, ‘gentrification’ and ‘creative’ and ‘smart’ city initiatives refashion public space as sites of selective inclusion and exclusion. In this context of monitoring and control procedures, in particular, children and young people’s use of space in parks, neighbourhoods, shopping malls and streets is often viewed as a threat to the social order, requiring various forms of remedial action. This paper suggests that cities, places and spaces and those who seek to use them, can be resilient in working to maintain and extend democratic freedoms and processes enshrined in Marshall’s concept of citizenship, calling sensor and surveillance systems to account. Such accountability could better inform the implementation of public policy around the design, build and governance of public space and also understandings of urban citizenship in the sensor saturated urban environment.

Keywords: citizenship, public space, surveillance, young people

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Authors: Jun Gil Ahn, Jong Tae Kim

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In this paper, we study the sensor fusion structure on the multipoint control unit (MCU). Sensor fusion using Kalman filter for 9-axis sensors is considered. The 9-axis inertial sensor is the combination of 3-axis accelerometer, 3-axis gyroscope and 3-axis magnetometer. We implement the sensor fusion structure among the sensor hubs in MCU and measure the execution time, power consumptions, and total energy. Experiments with real data from 9-axis sensor in 20Mhz show that the average power consumptions are 44mW and 48mW on Cortx-M0 and Cortex-M3 MCU, respectively. Execution times are 613.03 us and 305.6 us respectively.

Keywords: 9-axis sensor, Kalman filter, MCU, sensor fusion

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Authors: Vega Erdiana Dwi Fransiska, Abyan Rai Fauzan Machmudin

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Particularly, space configuration zoning is the very first juncture of a complete space configuration and region planning. Zoning is aimed to define discrete knowledge based on a local wisdom. Ancient predecessor scientifically study the sign of natural disaster towards ethnography approach by operating this knowledge. There are three main functions of space zoning, which are control function, guidance function, and additional function. The control function refers to an instrument for development control and as one of the essentials in controlling land use. Hence, the guidance function indicates as guidance for proposing operational planning and technical development or land usage. Any additional function is useful as a supplementary for region or province planning details. This phase likewise accredits to define boundary in an open space based on geographical appearance. Informant who is categorized as an elder lives in earthquake prone area, to be precise the area is the surrounding of Mount Krakatau. The collected data is one of method for analyzed with thematic model. Later on, it will be verified. In space zoning, long-range distance sensor is applied to determine visualization of the area, which will be zoned before the step of survey to validate the data. The data, which is obtained from long-range distance sensor and site survey, will be overlaid using GIS Platform. Comparing the knowledge based on a local wisdom that is well known by elderly in that area, some of it is relevant to the research, while the others are not. Based on the site survey, the interpretation of a long-range distance sensor, and determining space zoning by considering various aspects resulted in the pattern map of space zoning. This map can be integrated with disaster mitigation affected by volcano eruption.

Keywords: elderly, GIS platform, local wisdom, space zoning

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Authors: Shahram Payandeh

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This paper presents an overview of a model which can be used as a part of a decision support system when fusing information from multiple sensing environment. Data fusion has been widely studied in the past few decades and numerous frameworks have been proposed to facilitate decision making process under uncertainties. Multi-sensor data fusion technology plays an increasingly significant role during people tracking and activity recognition. This paper presents an overview of a quantum model as a part of a decision-making process in the context of multi-sensor data fusion. The paper presents basic definitions and relationships associating the decision-making process and quantum model formulation in the presence of uncertainties.

Keywords: quantum model, sensor space, sensor network, decision support

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Authors: Srinivasan Chandrasekaran, Thailammai Chithambaram, Shihas A. Khader

Abstract:

The early-stage damage detection in offshore structures requires continuous structural health monitoring and for the large area the position of sensors will also plays an important role in the efficient damage detection. Determining the dynamic behavior of offshore structures requires dense deployment of sensors. The wired Structural Health Monitoring (SHM) systems are highly expensive and always needs larger installation space to deploy. Wireless sensor networks can enhance the SHM system by deployment of scalable sensor network, which consumes lesser space. This paper presents the results of wireless sensor network based Structural Health Monitoring method applied to a scaled experimental model of offshore structure that underwent wave loading. This method determines the serviceability of the offshore structure which is subjected to various environment loads. Wired and wireless sensors were installed in the model and the response of the scaled BLSRP model under wave loading was recorded. The wireless system discussed in this study is the Raspberry pi board with Arm V6 processor which is programmed to transmit the data acquired by the sensor to the server using Wi-Fi adapter, the data is then hosted in the webpage. The data acquired from the wireless and wired SHM systems were compared and the design of the wireless system is verified.

Keywords: condition assessment, damage detection, structural health monitoring, structural response, wireless sensor network

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Authors: Nurul Amziah Md Yunus, Izhal Abdul Halin, Nasri Sulaiman, Noor Faezah Ismail, Ong Kai Sheng

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The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

Keywords: pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS

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Authors: Yossiri Ariyakul, Piyakiat Insom, Poonyawat Sangiamkulthavorn, Takamichi Nakamoto

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In this paper, the method of optimization algorithm for sensor network comprised of movable sensor nodes which can be used for odor source localization was proposed. A sensor node is composed of an odor sensor, an anemometer, and a wireless communication module. The odor intensity measured from the sensor nodes are sent to the processor to perform the localization based on optimization algorithm by which the odor source localization map is obtained as a result. The map can represent the exact position of the odor source or show the direction toward it remotely. The proposed method was experimentally validated by creating the odor source localization map using three, four, and five sensor nodes in which the accuracy to predict the position of the odor source can be observed.

Keywords: odor sensor, odor source localization, optimization, sensor network

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Authors: Ünal Kızıl, Levent Genç, Sefa Aksu, Ahmet Tapınç

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The Figaro AM-1 sensor module which employs TGS 2600 model gas sensor in air quality assessment was used. The system was coupled with a microprocessor that enables sensor module to create warning message via telephone. This low cot sensor system’s performance was compared with a Diagnose II commercial electronic nose system. Both air quality sensor and electronic nose system employ metal oxide chemical gas sensors. In the study experimental setup, data acquisition methods for electronic nose system, and performance of the low cost air quality system were evaluated and explained.

Keywords: air quality, electronic nose, environmental quality, gas sensor

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Authors: Sungsik Jo, Hyeonwoo Kim, Iksu Choi, Hunmo Kim

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In the SHP, LVDT sensor is for detecting the length changes of the EHA output, and the thrust of the EHA is controlled by the pressure sensor. Sensor is possible to cause hardware fault by internal problem or external disturbance. The EHA of SHP is able to be uncontrollable due to control by feedback from uncertain information, on this paper; the sliding mode observer algorithm estimates the original sensor output information in permanent sensor fault. The proposed algorithm shows performance to recovery fault of disconnection and short circuit basically, also the algorithm detect various of sensor fault mode.

Keywords: smart hybrid powerpack (SHP), electro hydraulic actuator (EHA), permanent sensor fault tolerance, sliding mode observer (SMO), graphic user interface (GUI)

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Authors: Alfi Al Fahreizy

Abstract:

By using LPG (Liquid Protelium Gas), it is very difficult to detect gas leak. Consequently, there is so many incident of gas leak that makes explosion which is occurred in many regions of Indonesia. In this paper, the researcher tries to overcome with it by adding gas sensor for LPG in a smartphone. The aim is to choose the best sensor and how to use it . The methode is to choose sensor by selecting from sensor data sheet qualitatively by giving grade from 1 to 5. Flow chart is shown to make best steps notification that possible to implemented in smartphone.

Keywords: energy conversion, gas leak, smartphone, explosion, LPG

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Authors: Zoubida Mahi

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A successful satellite mission in space requires a reliable attitude and orbit control system to command, control and position the satellite in appropriate orbits. Several sensors are used for attitude control, such as magnetic sensors, earth sensors, horizon sensors, gyroscopes, and solar sensors. The star tracker is the most accurate sensor compared to other sensors, and it is able to offer high-accuracy attitude control without the need for prior attitude information. There are mainly three approaches in star sensor research: digital simulation, hardware in the loop simulation, and field test of star observation. In the digital simulation approach, all of the processes are done in software, including star image simulation. Hence, it is necessary to develop star image simulation software that could simulate real space environments and various star sensor configurations. In this paper, we present a new stellar image simulation tool that is used to test and validate the stellar sensor algorithms; the developed tool allows to simulate of stellar images with several types of noise, such as background noise, gaussian noise, Poisson noise, multiplicative noise, and several scenarios that exist in space such as the presence of the moon, the presence of optical system problem, illumination and false objects. On the other hand, we present in this paper a new star extraction algorithm based on a new centroid calculation method. We compared our algorithm with other star extraction algorithms from the literature, and the results obtained show the star extraction capability of the proposed algorithm.

Keywords: star tracker, star simulation, star detection, centroid, noise, scenario

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Authors: H. Gorine, M. Ramadan Elmezughi

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In this paper, we investigate security issues and challenges facing researchers in wireless sensor networks and countermeasures to resolve them. The broadcast nature of wireless communication makes Wireless Sensor Networks prone to various attacks. Due to resources limitation constraint in terms of limited energy, computation power and memory, security in wireless sensor networks creates different challenges than wired network security. We will discuss several attempts at addressing the issues of security in wireless sensor networks in an attempt to encourage more research into this area.

Keywords: wireless sensor networks, network security, light weight encryption, threats

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Authors: Yibeltal Chanie Manie, Zebider Asire Munyelet

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5G and 6G technology offers enhanced quality of service with high data transmission rates, which necessitates the implementation of the Internet of Things (IoT) in 5G/6G architecture. In this paper, we proposed the integration of free space optical communication (FSO) with fiber sensor networks for IoT applications. Recently, free-space optical communications (FSO) are gaining popularity as an effective alternative technology to the limited availability of radio frequency (RF) spectrum. FSO is gaining popularity due to flexibility, high achievable optical bandwidth, and low power consumption in several applications of communications, such as disaster recovery, last-mile connectivity, drones, surveillance, backhaul, and satellite communications. Hence, high-speed FSO is an optimal choice for wireless networks to satisfy the full potential of 5G/6G technology, offering 100 Gbit/s or more speed in IoT applications. Moreover, machine learning must be integrated into the design, planning, and optimization of future optical wireless communication networks in order to actualize this vision of intelligent processing and operation. In addition, fiber sensors are important to achieve real-time, accurate, and smart monitoring in IoT applications. Moreover, we proposed deep learning techniques to estimate the strain changes and peak wavelength of multiple Fiber Bragg grating (FBG) sensors using only the spectrum of FBGs obtained from the real experiment.

Keywords: optical sensor, artificial Intelligence, Internet of Things, free-space optics

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Authors: Soner Cubuk, Ozge Yilmaz, Ece Kok Yetimoglu, M. Vezir Kahraman

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In this work, a polymer based highly selective fluorescence sensor membrane was prepared by the photopolymerization technique for the determination Cd(II) ion. Sensor characteristics such as effects of pH, response time and foreign ions on the fluorescence intensity of the sensor were also studied. Under optimized conditions, the polymeric sensor shows a rapid, stable and linear response for 4.45x10-⁹ mol L-¹ - 4.45x10-⁸ mol L-¹ Cd(II) ion with the detection limit of 6.23x10-¹⁰ mol L-¹. In addition, sensor membrane was selective which is not affected by common foreign metal ions. The concentrations of the foreign ions such as Pb²+, Co²+, Ag+, Zn²+, Cu²+, Cr³+ are 1000-fold higher than Cd(II) ions. Moreover, the developed polymeric sensor was successfully applied to the determination of cadmium ions in food and water samples. This work was supported by Marmara University, Commission of Scientific Research Project.

Keywords: cadmium(II), fluorescence, photopolymerization, polymeric sensor

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Authors: Rohana Musa, Yuzman Yusoff, Chia Chieu Yin, Hanif Che Lah

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This paper presents the design and characterization of a low power Complementary Metal Oxide Semiconductor (CMOS) process sensor. The design is targeted for implementation using Silterra’s 180 nm CMOS process technology. The proposed process sensor employs a voltage threshold (V_th) extractor architecture for detection of variations in the fabrication process. The process sensor generates output voltages in the range of 401 mV (fast-fast corner) to 443 mV (slow-slow corner) at nominal condition. The power dissipation for this process sensor is 6.3 µW with a supply voltage of 1.8V with a silicon area of 190 µm X 60 µm. The preliminary result of this process sensor that was fabricated indicates a close resemblance between test and simulated results.

Keywords: CMOS process sensor, PVT sensor, threshold extractor circuit, Vth extractor circuit

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Authors: Sathapath Kilaso

Abstract:

Nowadays, Today, wireless sensor networks are an important technology that works with Internet of Things. It is receiving various data from many sensor. Then sent to processing or storing. By wireless network or through the Internet. The devices around us are intelligent, can receiving/transmitting and processing data and communicating through the system. There are many applications of wireless sensor networks, such as smart city, smart farm, environmental management, weather. This article will explore the use of wireless sensor networks in Thailand and collect data from Thai Thesis database in 2012-2017. How to Implementing Wireless Sensor Network Technology. Advantage from this study To know the usage wireless technology in many fields. This will be beneficial for future research. In this study was found the most widely used wireless sensor network in agriculture field. Especially for smart farms. And the second is the adoption of the environment. Such as weather stations and water inspection.

Keywords: wireless sensor network, smart city, survey, Adhoc Network

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Authors: Maleh Yassine, Ezzati Abdellah

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Wireless Sensor Networks (WSNs) are currently used in different industrial and consumer applications, such as earth monitoring, health related applications, natural disaster prevention, and many other areas. Security is one of the major aspects of wireless sensor networks due to the resource limitations of sensor nodes. However, these networks are facing several threats that affect their functioning and their life. In this paper we present security attacks in wireless sensor networks, and we focus on a review and analysis of the recent Intrusion Detection schemes in WSNs.

Keywords: wireless sensor networks, security attack, denial of service, IDS, cluster-based model, signature based IDS, hybrid IDS

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Authors: M. Zyczkowski, P. Markowski, M. Karol

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The team from IOE MUT is developing fiber optic sensors for the security systems for 15 years. The conclusions of the work indicate that these sensors are complicated. Moreover, these sensors are expensive to produce and require sophisticated signal processing methods.We present the results of the investigations of three different applications of the modalmetric sensor: • Protection of museum collections and heritage buildings, • Protection of fiber optic transmission lines, • Protection of objects of critical infrastructure. Each of the presented applications involves different requirements for the system. The results indicate that it is possible to developed a fiber optic sensor based on a single fiber. Modification of optoelectronic parts with a change of the length of the sensor and the method of reflections of propagating light at the end of the sensor allows to adjust the system to the specific application.

Keywords: modalmetric fiber optic sensor, security sensor, optoelectronic parts, signal processing

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Authors: S. M. Hamidi, M. Afsharnia

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Gas sensors based on magneto-plasmonic (MP) structures have attracted much attention due to the high signal to noise ratio in these type of sensors. In these sensors, both the plasmonic and the MO properties of the resulting MP structure become interrelated because the surface Plasmon resonance (SPR) of the metallic medium. This interconnection can be modified the sensor responses and enhanced the signal to noise ratio. So far the sensor features of multilayered structures made of noble and ferromagnetic metals as Au/Co/Au MP multilayer with TiO2 sensor layer have been extensively studied, but their SPR assisted sensor response need to the krestchmann configuration. Here, we present a systematic study on the new MP structure based on one-dimensional nano-grating Au/ Co/ Au/ TiO2 multilayer to utilize as an inexpensive and easy to use gas sensor.

Keywords: Magneto-plasmonic structures, Gas sensor, nano-garting

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Authors: Jai Prakash Prasad, Suresh Chandra Mohan

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Modern wireless sensor networks (WSN) consist of small size, low cost devices which are networked through tight wireless communications. WSN fundamentally offers cooperation, coordination among sensor networks. Potential applications of wireless sensor networks are in healthcare, natural disaster prediction, data security, environmental monitoring, home appliances, entertainment etc. The design, development and deployment of WSN based on application requirements. The WSN design performance is optimized to improve network lifetime. The sensor node resources constrain such as energy and bandwidth imposes the limitation on efficient resource utilization and sensor node management. The proposed N-Tier GRID routing protocol focuses on the design of energy efficient large scale wireless sensor network for improved performance than the existing protocol.

Keywords: energy efficient, network lifetime, sensor networks, wireless communication

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Authors: Ch. Sandeep Kumar Subudhi, S. Sivanandam

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Our system is to monitor the human body temperature, blood pressure (BP), Pulse Rate and ECG and tracking the patient location. In our system the body temperature is detected by using LM35 temperature sensor, blood pressure is detected by the BP sensor, pulse rate is detected by the ear plug pulse sensor and the ECG is detected by the three lead ECG sensor in the working environment of the patient. The sensed information is sent to the PIC16F877 microcontroller through signal conditioning circuit. A desired amount of sensor value is set and if it is exceeded preliminary steps should be taken by indication by buzzer. The sensor information will be transmitted from the patient unit to the main controller unit with the help of Zigbee communication medium which is connected with the microcontrollers in the both units. The main controller unit will send those sensor data as well as the location of that patient by the help of GPS module to the observer/doctor. The observer/doctor can receive the SMS sent by GSM module and further decision can be taken. The message is sent to a cell phone using global system mobile (GSM) Modem. MAX232 acts as a driver between microcontroller and modem.

Keywords: LM35, heart beat sensor, ECG Sensor, BP Sensor, Zigbee module, GSM module, GPS module, PIC16F877A microcontroller

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Authors: Kirankumar B. Balavalad, Bhagyashree Mudhol, B. G. Sheeparamatti

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MEMS sensor have gained popularity in automotive, biomedical, and industrial applications. In this paper, the design and simulation of conventional, slotted, and perforated MEMS capacitive pressure sensor is proposed. Polysilicon material is used as diaphragm material that deflects due to applied pressure. Better sensitivity is the main advantage of conventional pressure sensor as compared with other two sensors and perforated pressure sensor achieves large operating pressure range. The proposed MEMS sensor demonstrated with diaphragm length 50um, gap depth 3um is being modelled. The simulation is carried out for different types of MEMS capacitive pressure sensor using COMSOL Multiphysics and Coventor ware.

Keywords: MEMS, conventional pressure sensor, slotted and perforated diaphragm, COMSOL multiphysics, coventor ware

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