Search results for: inertia sensor

Authors: Zhou Yingkun, Xu Guorui, Wei Siming, Huang Yongzhang

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With the increasing of the penetration of renewable energy in power system, the whole inertia of the power system is declining, which will endanger the frequency stability of the power system. In order to enhance the inertia, virtual synchronous generator (VSG) has been proposed. In addition, the motor-generator pair (MGP) system is proposed to enhance grid inertia. Both of them need additional equipment to provide instantaneous energy, so the economic problem should be considered. In this paper, the basic working principle of MGP system and VSG are introduced firstly. Then, the technical characteristics and economic investment of MGP/VSG are compared by calculation and simulation. The results show that the MGP system can provide same inertia with less cost than VSG.

Keywords: high renewable energy penetration, inertia of power system, motor-generator pair (MGP) system, virtual synchronous generator (VSG), techno-economic analysis

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Authors: Jin Wang, Chunyi Zhu, Chongjian Li, Dapeng Zheng

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A method based on virtual inertia for suppressing electromechanical torsional vibration of a large-power AC drive system is presented in this paper. The main drive system of the rolling mill is the research object, and a two-inertia elastic model is established to study the mechanism of electromechanical torsional vibration. The improvement is made based on the control of the load observer. The virtual inertia control ratio K is added to the speed forward channel, and the feedback loop adds 1-K to design virtual inertia control. The control method combines the advantages of the positive and negative feedback control of the load observer, can achieve the purpose of controlling the moment of inertia of the motor from the perspective of electrical control, and effectively suppress oscillation.

Keywords: electromechanical torsional vibration, large-power AC drive system, load observer, simulation design

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Authors: Jung-Ho Moon, Myung-Gon Yoon, Tae Kwon Ha

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This paper presents a wireless sensor network protocol for a car parking monitoring system. A wireless sensor network for the purpose is composed of multiple sensor nodes, a sink node, a gateway, and a server. Each of the sensor nodes is equipped with a 3-axis AMR sensor and deployed in the center of a parking space. The sensor node reads its sensor values periodically and transmits the data to the sink node if the current and immediate past sensor values show a difference exceeding a threshold value. The operations of the sink and sensor nodes are described in detail along with flow diagrams. The protocol allows a low-duty cycle operation of the sensor nodes and a flexible adjustment of the threshold value used by the sensor nodes.

Keywords: car parking monitoring, sensor node, wireless sensor network, network protocol

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Authors: Arakelian Vigen, Geng Jing, Le Baron Jean-Paul

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The paper deals with the design of parallel manipulators with balanced inertia forces and moments. The balancing of the resultant of the inertia forces of 3-RRR planar parallel manipulators is carried out through mass redistribution and centre of mass acceleration minimization. The proposed balancing technique is achieved in two steps: at first, optimal redistribution of the masses of input links is accomplished, which ensures the similarity of the end-effector trajectory and the manipulator’s common centre of mass trajectory, then, optimal trajectory planning of the end-effector by 'bang-bang' profile is reached. In such a way, the minimization of the magnitude of the acceleration of the centre of mass of the manipulator brings about a minimization of shaking force. To minimize the resultant of the inertia moments (shaking moment), the active balancing via inertia flywheel is applied. However, in this case, the active balancing is quite different from previous applications because it provides only a partial cancellation of the shaking moment due to the incomplete balancing of shaking force.

Keywords: dynamic balancing, inertia force minimization, inertia moment minimization, 3-RRR planar parallel manipulator

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Authors: W. Du, X. Wang, Jun Cao, H. F. Wang

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Due to the randomness and uncertainty of wind energy, modern power systems integrating large-scale wind generation will be significantly impacted in terms of system performance and technical challenges. System inertia with high wind penetration is decreasing when conventional thermal generators are gradually replaced by wind turbines, which do not naturally contribute to inertia response. The power imbalance caused by wind power or demand fluctuations leads to the instability of system frequency. Accordingly, the need to attach the supplementary virtual inertia control to wind farms (WFs) strongly arises. When multi-wind farms are connected to the grid simultaneously, the selection of which critical WFs to install the virtual inertia control is greatly important to enhance the stability of system frequency. By building the small signal model of wind power systems considering frequency regulation, the installation locations are identified by the geometric measures of the mode observability of WFs. In addition, this paper takes the impacts of grid topology and selection of feedback control signals into consideration. Finally, simulations are conducted on a multi-wind farms power system and the results demonstrate that the designed virtual inertia control method can effectively assist the frequency regulation.

Keywords: frequency regulation, virtual inertia control, installation locations, observability, wind farms

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Authors: Jun Gil Ahn, Jong Tae Kim

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In this paper, we study the sensor fusion structure on the multipoint control unit (MCU). Sensor fusion using Kalman filter for 9-axis sensors is considered. The 9-axis inertial sensor is the combination of 3-axis accelerometer, 3-axis gyroscope and 3-axis magnetometer. We implement the sensor fusion structure among the sensor hubs in MCU and measure the execution time, power consumptions, and total energy. Experiments with real data from 9-axis sensor in 20Mhz show that the average power consumptions are 44mW and 48mW on Cortx-M0 and Cortex-M3 MCU, respectively. Execution times are 613.03 us and 305.6 us respectively.

Keywords: 9-axis sensor, Kalman filter, MCU, sensor fusion

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Authors: Shishir Lamichhane, Saurav Dulal, Bibek Gautam, Madan Thapa Magar, Indraman Tamrakar

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Renewable energies such as wind turbines and solar photovoltaic have gained significance as a result of global environmental pollution and energy crises. These sources of energy are converted into electrical energy and delivered to end-users through the utility system. As a result of the widespread use of power electronics-based grid-interfacing technologies to accommodate renewable sources of energy, the prevalence of converters has expanded as well. As a result, the power system's rotating inertia is decreasing, endangering the utility grid's stability. The use of Virtual Synchronous Machine (VSM) technology has been proposed to overcome the grid stability problem due to low rotating inertia. The grid-connected inverter used in VSM can be controlled to emulate inertia, which replicates the external features of a synchronous generator. As a result, the rotating inertia is increased to support the power system's stability. A power angle control strategy is proposed in this paper and its model is simulated in MATLAB/Simulink to study the effects of parameter disturbances on the active power and frequency for a VSM. The system consists of a synchronous generator, which is modeled in such a way that the frequency drops to an unacceptable region during transient conditions due to a lack of inertia when VSM is not used. Then, the suggested model incorporating VSM emulates rotating inertia, injecting a controllable amount of energy into the grid during frequency transients to enhance transient stability.

Keywords: damping constant, inertia–constant, ROCOF, transient stability, distributed sources

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Authors: Nurul Amziah Md Yunus, Izhal Abdul Halin, Nasri Sulaiman, Noor Faezah Ismail, Ong Kai Sheng

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The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

Keywords: pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS

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Authors: Johnson Audu, Faisal Fairag

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In a bounded subset of R^d, d=2 or 3, we consider the Darcy-Forchheimer power model with the exponent 1 < m ≤ 2 for a single-phase strong-inertia fluid flow in a porous medium. Under necessary compatibility condition, and some mild regularity assumptions on the interior and the boundary data, we prove the existence and uniqueness of solution (u, p) in L^(m+1 ) (Ω)^d X (W^(1,(m+1)/m) (Ω)^d ⋂L_0^2 (Ω)^d) and its stability.

Keywords: porous media, power law, strong inertia, nonlinear, monotone type

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Authors: Yossiri Ariyakul, Piyakiat Insom, Poonyawat Sangiamkulthavorn, Takamichi Nakamoto

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In this paper, the method of optimization algorithm for sensor network comprised of movable sensor nodes which can be used for odor source localization was proposed. A sensor node is composed of an odor sensor, an anemometer, and a wireless communication module. The odor intensity measured from the sensor nodes are sent to the processor to perform the localization based on optimization algorithm by which the odor source localization map is obtained as a result. The map can represent the exact position of the odor source or show the direction toward it remotely. The proposed method was experimentally validated by creating the odor source localization map using three, four, and five sensor nodes in which the accuracy to predict the position of the odor source can be observed.

Keywords: odor sensor, odor source localization, optimization, sensor network

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Authors: Ünal Kızıl, Levent Genç, Sefa Aksu, Ahmet Tapınç

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The Figaro AM-1 sensor module which employs TGS 2600 model gas sensor in air quality assessment was used. The system was coupled with a microprocessor that enables sensor module to create warning message via telephone. This low cot sensor system’s performance was compared with a Diagnose II commercial electronic nose system. Both air quality sensor and electronic nose system employ metal oxide chemical gas sensors. In the study experimental setup, data acquisition methods for electronic nose system, and performance of the low cost air quality system were evaluated and explained.

Keywords: air quality, electronic nose, environmental quality, gas sensor

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Authors: Sungsik Jo, Hyeonwoo Kim, Iksu Choi, Hunmo Kim

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In the SHP, LVDT sensor is for detecting the length changes of the EHA output, and the thrust of the EHA is controlled by the pressure sensor. Sensor is possible to cause hardware fault by internal problem or external disturbance. The EHA of SHP is able to be uncontrollable due to control by feedback from uncertain information, on this paper; the sliding mode observer algorithm estimates the original sensor output information in permanent sensor fault. The proposed algorithm shows performance to recovery fault of disconnection and short circuit basically, also the algorithm detect various of sensor fault mode.

Keywords: smart hybrid powerpack (SHP), electro hydraulic actuator (EHA), permanent sensor fault tolerance, sliding mode observer (SMO), graphic user interface (GUI)

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Authors: Alfi Al Fahreizy

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By using LPG (Liquid Protelium Gas), it is very difficult to detect gas leak. Consequently, there is so many incident of gas leak that makes explosion which is occurred in many regions of Indonesia. In this paper, the researcher tries to overcome with it by adding gas sensor for LPG in a smartphone. The aim is to choose the best sensor and how to use it . The methode is to choose sensor by selecting from sensor data sheet qualitatively by giving grade from 1 to 5. Flow chart is shown to make best steps notification that possible to implemented in smartphone.

Keywords: energy conversion, gas leak, smartphone, explosion, LPG

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Authors: Gagandeep Singh

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The sensor field optimization is a serious issue in WSNs and has been ignored by many researchers. As in numerous real-time sensing fields the sensor nodes on the corners i.e. on the segment boundaries will become lifeless early because no extraordinary safety is presented for them. Accordingly, in this research work the central objective is on the segment based optimization by separating the sensor field between advance and normal segments. The inspiration at the back this sensor field optimization is to extend the time spam when the first sensor node dies. For the reason that in normal sensor nodes which were exist on the borders may become lifeless early because the space among them and the base station is more so they consume more power so at last will become lifeless soon.

Keywords: WSNs, ECRSEP, SEP, field optimization, energy

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Authors: H. Gorine, M. Ramadan Elmezughi

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In this paper, we investigate security issues and challenges facing researchers in wireless sensor networks and countermeasures to resolve them. The broadcast nature of wireless communication makes Wireless Sensor Networks prone to various attacks. Due to resources limitation constraint in terms of limited energy, computation power and memory, security in wireless sensor networks creates different challenges than wired network security. We will discuss several attempts at addressing the issues of security in wireless sensor networks in an attempt to encourage more research into this area.

Keywords: wireless sensor networks, network security, light weight encryption, threats

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Authors: Chyi Jaw

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Prior literature on innovation diffusion or acceptance has almost exclusively concentrated on consumers’ positive attitudes and behaviors for new products/services. Consumers’ negative attitudes or behaviors to innovations have received relatively little marketing attention, but it happens frequently in practice. This study discusses consumer psychological factors when they try to learn or use new technologies. According to recent research, technological innovation acceptance has been considered as a dynamic or mediated process. This research argues that consumers can experience inertia and emotions in the initial use of new technologies. However, given such consumer psychology, the argument can be made as to whether the inclusion of consumer inertia (routine seeking and cognitive rigidity) and emotions increases the predictive power of new technology acceptance model. As data from the empirical study find, the process is potentially consumer emotion changing (independent of performance benefits) because of technology complexity and consumer inertia, and impact innovative technology use significantly. Finally, the study presents the superior predictability of the hypothesized model, which let managers can better predict and influence the successful diffusion of complex technological innovations.

Keywords: cognitive rigidity, consumer emotions, new technology acceptance, routine seeking, technology complexity

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Authors: Yang Xiong, Hua Cheng

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In this paper, for the basic problem of wireless sensor network topology control and deployment, the Roesser model in rectangular grid sensor networks is presented. In addition, a general constructive realization procedure will be proposed. The procedure enables a distributed implementation of linear systems on a sensor network. A non-trivial example is illustrated.

Keywords: grid sensor networks, Roesser model, state-space realization, multidimensional systems

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Authors: Dae Il Kim, Jungho Moon, Tae Yun Chung

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This paper presents a car parking monitoring system using a wireless sensor network. The presented sensor network has a line-shaped topology and adopts a TDMA-based protocol for allowing multi-hop communications. Sensor nodes are deployed in the ground of an outdoor parking lot in such a way that a sensor node monitors a parking space. Each sensor node detects the availability of the associated parking space and transmits the detection result to a sink node via intermediate sensor nodes existing between the source sensor node and the sink node. We evaluate the feasibility of the presented sensor network and the TDMA-based communication protocol through experiments using 11 sensor nodes deployed in a real parking lot. The result shows that the presented car parking monitoring system is robust to changes in the communication environments and efficient for monitoring parking spaces of outdoor parking lots.

Keywords: multi-hop communication, parking monitoring system, TDMA, wireless sensor network

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Authors: Soner Cubuk, Ozge Yilmaz, Ece Kok Yetimoglu, M. Vezir Kahraman

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In this work, a polymer based highly selective fluorescence sensor membrane was prepared by the photopolymerization technique for the determination Cd(II) ion. Sensor characteristics such as effects of pH, response time and foreign ions on the fluorescence intensity of the sensor were also studied. Under optimized conditions, the polymeric sensor shows a rapid, stable and linear response for 4.45x10-⁹ mol L-¹ - 4.45x10-⁸ mol L-¹ Cd(II) ion with the detection limit of 6.23x10-¹⁰ mol L-¹. In addition, sensor membrane was selective which is not affected by common foreign metal ions. The concentrations of the foreign ions such as Pb²+, Co²+, Ag+, Zn²+, Cu²+, Cr³+ are 1000-fold higher than Cd(II) ions. Moreover, the developed polymeric sensor was successfully applied to the determination of cadmium ions in food and water samples. This work was supported by Marmara University, Commission of Scientific Research Project.

Keywords: cadmium(II), fluorescence, photopolymerization, polymeric sensor

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Authors: Rohana Musa, Yuzman Yusoff, Chia Chieu Yin, Hanif Che Lah

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This paper presents the design and characterization of a low power Complementary Metal Oxide Semiconductor (CMOS) process sensor. The design is targeted for implementation using Silterra’s 180 nm CMOS process technology. The proposed process sensor employs a voltage threshold (V_th) extractor architecture for detection of variations in the fabrication process. The process sensor generates output voltages in the range of 401 mV (fast-fast corner) to 443 mV (slow-slow corner) at nominal condition. The power dissipation for this process sensor is 6.3 µW with a supply voltage of 1.8V with a silicon area of 190 µm X 60 µm. The preliminary result of this process sensor that was fabricated indicates a close resemblance between test and simulated results.

Keywords: CMOS process sensor, PVT sensor, threshold extractor circuit, Vth extractor circuit

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Authors: Yazan M. Alatrash, Han-ok Kang, Hyun-gi Yoon, Shen Zhang, Juhyeon Yoon

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Flow coastdown phenomena are very important to secure nuclear fuel integrity during loss of off-site power accidents. In this study, primary coolant flow coastdown phenomena are investigated for the Jordan Research and Training Reactor (JRTR) using a simulation software package, Modular Modelling System (MMS). Two MMS models are built. The first one is a simple model to investigate the characteristics of the primary coolant pump only. The second one is a model for a simulation of the Primary Coolant System (PCS) loop, in which all the detailed design data of the JRTR PCS system are modelled, including the geometrical arrangement data. The same design data for a PCS pump are used for both models. Coastdown curves obtained from the two models are compared to study the PCS loop coolant inertia effect on a flow coastdown. Results showed that the loop coolant inertia effect is found to be small in the JRTR PCS loop, i.e., about one second increases in a coastdown half time required to halve the coolant flow rate. The effects of different flywheel inertia on the flow coastdown are also investigated. It is demonstrated that the coastdown half time increases with the flywheel inertia linearly. The designed coastdown half time is proved to be well above the design requirement for the fuel integrity.

Keywords: flow coastdown, loop inertia, modelling, research reactor

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Authors: Sathapath Kilaso

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Nowadays, Today, wireless sensor networks are an important technology that works with Internet of Things. It is receiving various data from many sensor. Then sent to processing or storing. By wireless network or through the Internet. The devices around us are intelligent, can receiving/transmitting and processing data and communicating through the system. There are many applications of wireless sensor networks, such as smart city, smart farm, environmental management, weather. This article will explore the use of wireless sensor networks in Thailand and collect data from Thai Thesis database in 2012-2017. How to Implementing Wireless Sensor Network Technology. Advantage from this study To know the usage wireless technology in many fields. This will be beneficial for future research. In this study was found the most widely used wireless sensor network in agriculture field. Especially for smart farms. And the second is the adoption of the environment. Such as weather stations and water inspection.

Keywords: wireless sensor network, smart city, survey, Adhoc Network

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Authors: Maleh Yassine, Ezzati Abdellah

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Wireless Sensor Networks (WSNs) are currently used in different industrial and consumer applications, such as earth monitoring, health related applications, natural disaster prevention, and many other areas. Security is one of the major aspects of wireless sensor networks due to the resource limitations of sensor nodes. However, these networks are facing several threats that affect their functioning and their life. In this paper we present security attacks in wireless sensor networks, and we focus on a review and analysis of the recent Intrusion Detection schemes in WSNs.

Keywords: wireless sensor networks, security attack, denial of service, IDS, cluster-based model, signature based IDS, hybrid IDS

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Authors: M. Zyczkowski, P. Markowski, M. Karol

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The team from IOE MUT is developing fiber optic sensors for the security systems for 15 years. The conclusions of the work indicate that these sensors are complicated. Moreover, these sensors are expensive to produce and require sophisticated signal processing methods.We present the results of the investigations of three different applications of the modalmetric sensor: • Protection of museum collections and heritage buildings, • Protection of fiber optic transmission lines, • Protection of objects of critical infrastructure. Each of the presented applications involves different requirements for the system. The results indicate that it is possible to developed a fiber optic sensor based on a single fiber. Modification of optoelectronic parts with a change of the length of the sensor and the method of reflections of propagating light at the end of the sensor allows to adjust the system to the specific application.

Keywords: modalmetric fiber optic sensor, security sensor, optoelectronic parts, signal processing

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Authors: S. M. Hamidi, M. Afsharnia

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Gas sensors based on magneto-plasmonic (MP) structures have attracted much attention due to the high signal to noise ratio in these type of sensors. In these sensors, both the plasmonic and the MO properties of the resulting MP structure become interrelated because the surface Plasmon resonance (SPR) of the metallic medium. This interconnection can be modified the sensor responses and enhanced the signal to noise ratio. So far the sensor features of multilayered structures made of noble and ferromagnetic metals as Au/Co/Au MP multilayer with TiO2 sensor layer have been extensively studied, but their SPR assisted sensor response need to the krestchmann configuration. Here, we present a systematic study on the new MP structure based on one-dimensional nano-grating Au/ Co/ Au/ TiO2 multilayer to utilize as an inexpensive and easy to use gas sensor.

Keywords: Magneto-plasmonic structures, Gas sensor, nano-garting

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Authors: Zakaria Aketouane, Mustapha Malha, Abdellah Bah, Omar Ansari, Mohamed Asbik

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The present paper deals with the thermal performance of a hollow-brick filled with Phase Change Material (PCM). The main objective is to study the effect of percentage and melting temperature of the PCM on the thermal inertia and internal surface temperature of the hollow-brick. A numerical model based on the heat transfer equation and the apparent heat capacity method has been validated using experimental study from the literature. The results show that increasing the percentage of the PCM has a significant effect on time lag and decrement factor that define the thermal inertia; the internal temperature is reduced by 1.36°C to 5.39°C for a percentage from 11% to 71% in comparison to a brick without PCM. In addition, an appropriate melting temperature of 37°C has been deduced for the horizontal wall orientation in Rabat in comparison to 27°C and 47°C.

Keywords: appropriate melting temperature, decrement factor, phase change material, thermal inertia, time lag

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Authors: Doddy T. P. Enggarsyah, Soebowo Musa

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Covid-19 pandemic has changed business environments and has spread economic contagion rapidly, as the stringent lockdowns and social distancing, which were initially intended to cut off the spread, have instead cut off the flow of economies. With no existing experience or playbook to deal with such a crisis, the prolonged pandemic can lead to bankruptcies, despite the fact that there are cases of companies that are not only able to survive but also to increase sales and create more jobs amid the economic crisis. This quantitative research study clarifies conflicting findings on organizational inertia whether it is a better strategy to implement during a disruptive environment. 316 respondents who worked in diverse firms operating in various industry types in Indonesia have completed the survey with a response rate of 63.2%. Further, this study clarifies the roles and relationships between organizational inertia, organizational creativity, organizational agility, and organizational resilience that potentially have determinants factors on firm performance in a disruptive environment. The findings of the study confirm that the organizational inertia of the firm will set up strong protection on the organization's fundamental orientation, which eventually will confine organizations to build adequate creative and adaptability responses—such fundamental orientation built from path dependency along with past success and prolonged firm performance. Organizational inertia acts like a control mechanism to ensure the adequacy of the given responses. The term adequate is important, as being overly creative during a disruptive environment may have a contradictory result since it can burden the firm performance. During a disruptive environment, organizations will limit creativity by focusing more on creativity that supports the resilience and new technology adoption will be limited since the cost of learning and implementation are perceived as greater than the potential gains. The optimal path towards firm performance is gained through organizational resilience, as in a disruptive environment, the survival of the organization takes precedence over firm performance.

Keywords: disruptive environment, organizational agility, organizational creativity, organizational inertia, organizational resilience

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Authors: Jai Prakash Prasad, Suresh Chandra Mohan

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Modern wireless sensor networks (WSN) consist of small size, low cost devices which are networked through tight wireless communications. WSN fundamentally offers cooperation, coordination among sensor networks. Potential applications of wireless sensor networks are in healthcare, natural disaster prediction, data security, environmental monitoring, home appliances, entertainment etc. The design, development and deployment of WSN based on application requirements. The WSN design performance is optimized to improve network lifetime. The sensor node resources constrain such as energy and bandwidth imposes the limitation on efficient resource utilization and sensor node management. The proposed N-Tier GRID routing protocol focuses on the design of energy efficient large scale wireless sensor network for improved performance than the existing protocol.

Keywords: energy efficient, network lifetime, sensor networks, wireless communication

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Authors: Ch. Sandeep Kumar Subudhi, S. Sivanandam

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Our system is to monitor the human body temperature, blood pressure (BP), Pulse Rate and ECG and tracking the patient location. In our system the body temperature is detected by using LM35 temperature sensor, blood pressure is detected by the BP sensor, pulse rate is detected by the ear plug pulse sensor and the ECG is detected by the three lead ECG sensor in the working environment of the patient. The sensed information is sent to the PIC16F877 microcontroller through signal conditioning circuit. A desired amount of sensor value is set and if it is exceeded preliminary steps should be taken by indication by buzzer. The sensor information will be transmitted from the patient unit to the main controller unit with the help of Zigbee communication medium which is connected with the microcontrollers in the both units. The main controller unit will send those sensor data as well as the location of that patient by the help of GPS module to the observer/doctor. The observer/doctor can receive the SMS sent by GSM module and further decision can be taken. The message is sent to a cell phone using global system mobile (GSM) Modem. MAX232 acts as a driver between microcontroller and modem.

Keywords: LM35, heart beat sensor, ECG Sensor, BP Sensor, Zigbee module, GSM module, GPS module, PIC16F877A microcontroller

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Authors: Kirankumar B. Balavalad, Bhagyashree Mudhol, B. G. Sheeparamatti

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MEMS sensor have gained popularity in automotive, biomedical, and industrial applications. In this paper, the design and simulation of conventional, slotted, and perforated MEMS capacitive pressure sensor is proposed. Polysilicon material is used as diaphragm material that deflects due to applied pressure. Better sensitivity is the main advantage of conventional pressure sensor as compared with other two sensors and perforated pressure sensor achieves large operating pressure range. The proposed MEMS sensor demonstrated with diaphragm length 50um, gap depth 3um is being modelled. The simulation is carried out for different types of MEMS capacitive pressure sensor using COMSOL Multiphysics and Coventor ware.

Keywords: MEMS, conventional pressure sensor, slotted and perforated diaphragm, COMSOL multiphysics, coventor ware

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