Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 2

micropump Related Abstracts

2 Development of a New Piezoelectrically Actuated Micropump for Liquid and Gas

Authors: An-Shik Yang, Chih-Jer Lin, Chun-Ying Lee, Chiang-Ho Cheng

Abstract:

This paper aims to present the design, fabrication and test of a novel piezoelectric actuated, check-valves embedded micropump having the advantages of miniature size, light weight and low power consumption. This device is designed to pump gases and liquids with the capability of performing the self-priming and bubble-tolerant work mode by maximizing the stroke volume of the membrane as well as the compression ratio via minimization of the dead volume of the micropump chamber and channel. By experiment apparatus setup, we can get the real-time values of the flow rate of micropump, the displacement of the piezoelectric actuator and the deformation of the check valve, simultaneously. The micropump with check valve 0.4 mm in thickness obtained higher output performance under the sinusoidal waveform of 120 Vpp. The micropump achieved the maximum pumping rates of 42.2 ml/min and back pressure of 14.0 kPa at the corresponding frequency of 28 and 20 Hz. The presented micropump is able to pump gases with a pumping rate of 196 ml/min at operating frequencies of 280 Hz under the sinusoidal waveform of 120 Vpp.

Keywords: Actuator, check-valve, micropump, piezoelectric

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1 Development of Piezoelectric Gas Micropumps with the PDMS Check Valve Design

Authors: An-Shik Yang, Chiang-Ho Cheng, Ming-Yu Lai, Hon-Yi Cheng

Abstract:

This paper presents the design and fabrication of a novel piezoelectric actuator for a gas micropump with check valve having the advantages of miniature size, light weight and low power consumption. The micropump is designed to have eight major components, namely a stainless steel upper cover layer, a piezoelectric actuator, a stainless steel diaphragm, a PDMS chamber layer, two stainless steel channel layers with two valve seats, a PDMS check valve layer with two cantilever-type check valves and an acrylic substrate. A prototype of the gas micropump, with a size of 52 mm × 50 mm × 5.0 mm, is fabricated by precise manufacturing. This device is designed to pump gases with the capability of performing the self-priming and bubble-tolerant work mode by maximizing the stroke volume of the membrane as well as the compression ratio via minimization of the dead volume of the micropump chamber and channel. By experiment apparatus setup, we can get the real-time values of the flow rate of micropump and the displacement of the piezoelectric actuator, simultaneously. The gas micropump obtained higher output performance under the sinusoidal waveform of 250 Vpp. The micropump achieved the maximum pumping rates of 1185 ml/min and back pressure of 7.14 kPa at the corresponding frequency of 120 and 50 Hz.

Keywords: micropump, piezoelectric, PDMS, check valve

Procedia PDF Downloads 287