WASET
    Yu-Hsin Chen and  Yuan-Tai Hsieh and  Cheng-Shong Hong and  Chia-Ching Wu and  Cheng-Fu Yang and  Yu-Jhen Liou,  Deposition of Transparent IGZO Conducting Thin Films by Co-Sputtering of Zn2Ga2O3 and In2O3 Targets at Room Temperature.   journal   = {International Journal of Physical and Mathematical Sciences}, [online]. World Academy of Science, Engineering and Technology.
    June 2014, vol. 91(7). 616 - 619
    [viewed 26 April 2024]. Available from: https://publications.waset.org/pdf/9998742.