Muhammad Waseem Ashraf and Shahzadi Tayyaba and Nitin Afzulpurkar and Asim Nisar and Adisorn Tuantranont and Erik L J Bohez
Coupled Multifield Analysis of Piezoelectrically Actuated Microfluidic Device for Transdermal Drug Delivery Applications
376 - 380
2010
4
2
International Journal of Electronics and Communication Engineering
https://publications.waset.org/pdf/8091
https://publications.waset.org/vol/38
World Academy of Science, Engineering and Technology
In this paper, design, fabrication and coupled
multifield analysis of hollow outofplane silicon microneedle array
with piezoelectrically actuated microfluidic device for transdermal
drug delivery (TDD) applications is presented. The fabrication
process of silicon microneedle array is first done by series of
combined isotropic and anisotropic etching processes using
inductively coupled plasma (ICP) etching technology. Then coupled
multifield analysis of MEMS based piezoelectrically actuated device
with integrated 2×2 silicon microneedle array is presented. To predict
the stress distribution and model fluid flow in coupled field analysis,
finite element (FE) and computational fluid dynamic (CFD) analysis
using ANSYS rather than analytical systems has been performed.
Static analysis and transient CFD analysis were performed to predict
the fluid flow through the microneedle array. The inlet pressure from
10 kPa to 150 kPa was considered for static CFD analysis. In the
lumen region fluid flow rate 3.2946 μLmin is obtained at 150 V for
2×2 microneedle array. In the present study the authors have
performed simulation of structural, piezoelectric and CFD analysis
on three dimensional model of the piezoelectrically actuated
mcirofluidic device integrated with 2×2 microneedle array.
Open Science Index 38, 2010