%0 Journal Article
	%A Muhammad Waseem Ashraf and  Shahzadi Tayyaba and  Nitin Afzulpurkar and  Asim Nisar and  Adisorn Tuantranont and  Erik L J Bohez
	%D 2010
	%J International Journal of Electronics and Communication Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 38, 2010
	%T Coupled Multifield Analysis of Piezoelectrically Actuated Microfluidic Device for Transdermal Drug Delivery Applications
	%U https://publications.waset.org/pdf/8091
	%V 38
	%X In this paper, design, fabrication and coupled
multifield analysis of hollow out-of-plane silicon microneedle array
with piezoelectrically actuated microfluidic device for transdermal
drug delivery (TDD) applications is presented. The fabrication
process of silicon microneedle array is first done by series of
combined isotropic and anisotropic etching processes using
inductively coupled plasma (ICP) etching technology. Then coupled
multifield analysis of MEMS based piezoelectrically actuated device
with integrated 2×2 silicon microneedle array is presented. To predict
the stress distribution and model fluid flow in coupled field analysis,
finite element (FE) and computational fluid dynamic (CFD) analysis
using ANSYS rather than analytical systems has been performed.
Static analysis and transient CFD analysis were performed to predict
the fluid flow through the microneedle array. The inlet pressure from
10 kPa to 150 kPa was considered for static CFD analysis. In the
lumen region fluid flow rate 3.2946 μL/min is obtained at 150 V for
2×2 microneedle array. In the present study the authors have
performed simulation of structural, piezoelectric and CFD analysis
on three dimensional model of the piezoelectrically actuated
mcirofluidic device integrated with 2×2 microneedle array.
	%P 376 - 380