%0 Journal Article
	%A Dmitry S. Sitnikov and  Andrey V. Ovchinnikov
	%D 2011
	%J International Journal of Physical and Mathematical Sciences
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 55, 2011
	%T Application of Femtosecond Laser pulses for Nanometer Accuracy Profiling of Quartz and Diamond Substrates and for Multi-Layered Targets and Thin-Film Conductors Processing
	%U https://publications.waset.org/pdf/6750
	%V 55
	%X Research results and optimal parameters investigation
of laser cut and profiling of diamond and quartz substrates by
femtosecond laser pulses are presented. Profiles 10 μm in width, ~25
μm in depth and several millimeters long were made. Investigation of
boundaries quality has been carried out with the use of AFM
«Vecco». Possibility of technological formation of profiles and
micro-holes in diamond and quartz substrates with nanometer-scale
boundaries is shown. Experimental results of multilayer dielectric
cover treatment are also presented. Possibility of precise upper layer
(thickness of 70–140 nm) removal is demonstrated. Processes of thin
metal film (60 nm and 350 nm thick) treatment are considered.
Isolation tracks (conductance ~ 10-11 S) 1.6–2.5 μm in width in
conductive metal layers are formed.
	%P 931 - 933