%0 Journal Article
	%A Yung-Tien Liu and  Chun-Chao Wang
	%D 2009
	%J International Journal of Biomedical and Biological Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 32, 2009
	%T One-DOF Precision Position Control using the Combined Piezo-VCM Actuator
	%U https://publications.waset.org/pdf/6495
	%V 32
	%X This paper presents the control performance of a high-precision positioning device using the hybrid actuator composed of a piezoelectric (PZT) actuator and a voice-coil motor (VCM). The combined piezo-VCM actuator features two main characteristics: a large operation range due to long stroke of the VCM, and high precision and heavy load positioning ability due to PZT impact force. A one-degree-of-freedom (DOF) experimental setup was configured to examine the fundamental characteristics, and the control performance was effectively demonstrated by using a switching controller. In rough positioning state, an integral variable structure controller (IVSC) was used for the VCM to conduct long range of operation; in precision positioning state, an impact force controller (IFC) for the PZT actuator coupled with presliding states of the sliding table was used to obtain high-precision position control and achieve both forward and backward actuations. The experimental results showed that the sliding table having a mass of 881g and with a preload of 10 N was successfully positioned within the positioning accuracy of 10 nm in both forward and backward position controls.

	%P 189 - 194