Tim Giesen and  Christian Fischmann and  Fabian Böttinger and  Alexander Ehm and  Alexander Verl,  Development and Optimization of Automated Dry-Wafer Separation.   journal   = {International Journal of Industrial and Manufacturing Engineering}, [online]. World Academy of Science, Engineering and Technology.
    January 2012, vol. 61(1). 108 - 114
    [viewed 24 April 2024]. Available from: https://publications.waset.org/pdf/4341.