%0 Journal Article
	%A Guojia Ma and  Guoqiang Lin and  Shuili Gong and  Gang Sun and  Dawang Wang
	%D 2012
	%J International Journal of Materials and Metallurgical Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 68, 2012
	%T The Influence of Substrate Bias on the Mechanical Properties of a W- and S-containing DLC-based Solid-lubricant Film
	%U https://publications.waset.org/pdf/3529
	%V 68
	%X A diamond-like carbon (DLC) based solid-lubricant
film was designed and DLC films were successfully prepared using a
microwave plasma enhanced magnetron sputtering deposition
technology. Post-test characterizations including Raman
spectrometry, X-ray diffraction, nano-indentation test, adhesion test,
friction coefficient test were performed to study the influence of
substrate bias voltage on the mechanical properties of the W- and
S-doped DLC films. The results indicated that the W- and S-doped
DLC films also had the typical structure of DLC films and a better
mechanical performance achieved by the application of a substrate
bias of -200V.
	%P 718 - 721