@article{(International Science Index):https://publications.waset.org/pdf/15854,
	  title     = {Effect of Surface Pretreatments on Nanocrystalline Diamond Deposited On Silicon Nitride Substrates},
	  author    = {D.N Awang Sh'ri and  E. Hamzah},
	  country	= {},
	  institution	= {},
	  abstract     = {The deposition of diamond films on a Si3N4 substrate
is an attractive technique for industrial applications because of the
excellent properties of diamond. Pretreatment of substrate is very
important prior to diamond deposition to promote nucleation and
adhesion between coating and substrate. Deposition of
nanocrystalline diamonds films on silicon nitride substrate have been
carried out by HF-CVD technique using mixture of methane and
hydrogen gases. Different pretreatment of substrate including
chemical etching consists of hot acid etching and basic etching and
mechanical etching were used to study the quality of diamond formed
on the substrate. The structure and morphology of diamond coating
have been studied using X-ray Diffraction (XRD) and Scanning
Electron Microscope (SEM) while diamond film quality has been
characterized using Raman spectroscopy. AFM was used to
investigate the effect of chemical etching and mechanical
pretreatment on the surface roughness of the substrates and the
resultant morphology of nanocrystalline diamond. It was found that
diamond film deposited on as-received, basic etched and grinded
substrate shows the morphology of cauliflower while blasted and
acidic etched substrates produce smooth, continuous diamond film.
However, the Raman investigation did not show any deviation in
quality of diamond film for any pretreatment.},
	    journal   = {International Journal of Materials and Metallurgical Engineering},
	  volume    = {4},
	  number    = {1},
	  year      = {2010},
	  pages     = {26 - 30},
	  ee        = {https://publications.waset.org/pdf/15854},
	  url   	= {https://publications.waset.org/vol/37},
	  bibsource = {https://publications.waset.org/},
	  issn  	= {eISSN: 1307-6892},
	  publisher = {World Academy of Science, Engineering and Technology},
	  index 	= {International Science Index 37, 2010},
	}