%0 Journal Article %A Hung-Wei Wu and Chien-Hsun Chu and Ru-Yuan Yang and Chin-Min Hsiung %D 2012 %J International Journal of Materials and Metallurgical Engineering %B World Academy of Science, Engineering and Technology %I Open Science Index 71, 2012 %T Effects of Mo Thickness on the Properties of AZO/Mo/AZO Multilayer Thin Films %U https://publications.waset.org/pdf/1337 %V 71 %X In this paper, we proposed the effects of Mo thickness on the properties of AZO/Mo/AZO multilayer thin films for opto-electronics applications. The structural, optical and electrical properties of AZO/Mo/AZO thin films were investigated. Optimization of the thin films coatings resulted with low resistivity of 9.98 × 10-5 )-cm, mobility of 12.75 cm2/V-s, carrier concentration of 1.05 × 1022 cm-3, maximum transmittance of 79.13% over visible spectrum of 380 – 780 nm and Haacke figure of merit (FOM) are 5.95 × 10-2 )-1 under Mo layer thickness of 15 nm. These results indicate an alternative candidate for use as a transparent electrode in solar cells and various displays applications. %P 1032 - 1035