%0 Journal Article
	%A Hung-Wei Wu and  Chien-Hsun Chu and  Ru-Yuan Yang and  Chin-Min Hsiung
	%D 2012
	%J International Journal of Materials and Metallurgical Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 71, 2012
	%T Effects of Mo Thickness on the Properties of AZO/Mo/AZO Multilayer Thin Films
	%U https://publications.waset.org/pdf/1337
	%V 71
	%X In this paper, we proposed the effects of Mo thickness
on the properties of AZO/Mo/AZO multilayer thin films for
opto-electronics applications. The structural, optical and electrical
properties of AZO/Mo/AZO thin films were investigated.
Optimization of the thin films coatings resulted with low resistivity of
9.98 × 10-5 )-cm, mobility of 12.75 cm2/V-s, carrier concentration of
1.05 × 1022 cm-3, maximum transmittance of 79.13% over visible
spectrum of 380 – 780 nm and Haacke figure of merit (FOM) are 5.95
× 10-2 )-1 under Mo layer thickness of 15 nm. These results indicate an
alternative candidate for use as a transparent electrode in solar cells
and various displays applications.
	%P 1032 - 1035