%0 Journal Article
	%A Mariya P. Aleksandrova and  Ivelina N. Cholakova and  Georgy K. Bodurov and  Georgy D. Kolev and  Georgy H.
Dobrikov
	%D 2012
	%J International Journal of Materials and Metallurgical Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 71, 2012
	%T Influence of UV Treatment on the Electrooptical Properties of Indium Tin Oxide Films Used in Flexible Displays
	%U https://publications.waset.org/pdf/13279
	%V 71
	%X Indium-tin oxide films are deposited by low plasma
temperature RF sputtering on highly flexible modification of glycol
polyethyleneterephtalate substrates. The produced layers are
characterized with transparency over 82 % and sheet resistance of
86.9 Ω/square. The film’s conductivity was further improved by
additional UV illumination from light source (365 nm), having power
of 250 W. The influence of the UV exposure dose on the structural
and electro-optical properties of ITO was investigated. It was
established that the optimum time of illumination is 10 minutes and
further UV treatment leads to polymer substrates degradation.
Structural and bonds type analysis show that at longer treatment
carbon atoms release and diffuse into ITO films, which worsen their
electrical behavior. For the optimum UV dose the minimum sheet
resistance was measured to be 19.2 Ω/square, and the maximum
transparency remained almost unchanged – above 82 %.
	%P 1080 - 1083