%0 Journal Article
	%A Jia-Chuan Lin and  Meng-Kai Hsu and  Hsi-Ting Hou and  Sin-Hong Liu
	%D 2012
	%J International Journal of Materials and Metallurgical Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 61, 2012
	%T Improvement of Photoluminescence Uniformity of Porous Silicon by using Stirring Anodization Process
	%U https://publications.waset.org/pdf/10486
	%V 61
	%X The electrolyte stirring method of anodization etching
process for manufacturing porous silicon (PS) is reported in this work.
Two experimental setups of nature air stirring (PS-ASM) and
electrolyte stirring (PS-ESM) are employed to clarify the influence of
stirring mechanisms on electrochemical etching process. Compared to
traditional fabrication without any stirring apparatus (PS-TM), a large
plateau region of PS surface structure is obtained from samples with
both stirring methods by the 3D-profiler measurement. Moreover, the
light emission response is also improved by both proposed electrolyte
stirring methods due to the cycling force in electrolyte could
effectively enhance etch-carrier distribution while the electrochemical
etching process is made. According to the analysis of statistical
calculation of photoluminescence (PL) intensity, lower standard
deviations are obtained from PS-samples with studied stirring methods,
i.e. the uniformity of PL-intensity is effectively improved. The
calculated deviations of PL-intensity are 93.2, 74.5 and 64,
respectively, for PS-TM, PS-ASM and PS-ESM.
	%P 15 - 18