@article{(Open Science Index):https://publications.waset.org/pdf/10486, title = {Improvement of Photoluminescence Uniformity of Porous Silicon by using Stirring Anodization Process}, author = {Jia-Chuan Lin and Meng-Kai Hsu and Hsi-Ting Hou and Sin-Hong Liu}, country = {}, institution = {}, abstract = {The electrolyte stirring method of anodization etching process for manufacturing porous silicon (PS) is reported in this work. Two experimental setups of nature air stirring (PS-ASM) and electrolyte stirring (PS-ESM) are employed to clarify the influence of stirring mechanisms on electrochemical etching process. Compared to traditional fabrication without any stirring apparatus (PS-TM), a large plateau region of PS surface structure is obtained from samples with both stirring methods by the 3D-profiler measurement. Moreover, the light emission response is also improved by both proposed electrolyte stirring methods due to the cycling force in electrolyte could effectively enhance etch-carrier distribution while the electrochemical etching process is made. According to the analysis of statistical calculation of photoluminescence (PL) intensity, lower standard deviations are obtained from PS-samples with studied stirring methods, i.e. the uniformity of PL-intensity is effectively improved. The calculated deviations of PL-intensity are 93.2, 74.5 and 64, respectively, for PS-TM, PS-ASM and PS-ESM.}, journal = {International Journal of Materials and Metallurgical Engineering}, volume = {6}, number = {1}, year = {2012}, pages = {15 - 18}, ee = {https://publications.waset.org/pdf/10486}, url = {https://publications.waset.org/vol/61}, bibsource = {https://publications.waset.org/}, issn = {eISSN: 1307-6892}, publisher = {World Academy of Science, Engineering and Technology}, index = {Open Science Index 61, 2012}, }