Ali Eltayeb Muhsin and Mohamed Elhadi Elsari, Design of Reliable and Low Cost Substrate Heater for Thin Film Deposition. journal = {International Journal of Mechanical and Mechatronics Engineering}, [online]. World Academy of Science, Engineering and Technology. August 2012, vol. 68(8). 1503 - 1508 [viewed 27 April 2024]. Available from: https://publications.waset.org/pdf/10164.