Li Long and Thomas Ortlepp, Optimization of Thermopile Sensor Performance of Polycrystalline Silicon Film. journal = {International Journal of Materials and Metallurgical Engineering}, [online]. World Academy of Science, Engineering and Technology. July 2023, vol. 199(7). 80 - 89 [viewed 27 April 2024]. Available from: https://publications.waset.org/pdf/10013161.