WASET
    S. Zhuiykov and  Zh. Hai and  H. Xu and  C. Xue,  Development of Single Layer of WO3 on Large Spatial Resolution by Atomic Layer Deposition Technique.   journal   = {International Journal of Materials and Metallurgical Engineering}, [online]. World Academy of Science, Engineering and Technology.
    January 2017, vol. 121(1). 46 - 49
    [viewed 26 April 2024]. Available from: https://publications.waset.org/pdf/10006167.