%0 Journal Article %A Branko Skoric and Aleksandar Miletic and Pal Terek and Lazar Kovacevic and Milan Kukuruzovic %D 2016 %J International Journal of Materials and Metallurgical Engineering %B World Academy of Science, Engineering and Technology %I Open Science Index 111, 2016 %T Nano Effects of Nitrogen Ion Implantation on TiN Hard Coatings Deposited by PVD and IBAD %U https://publications.waset.org/pdf/10003996 %V 111 %X In this paper, we present the results of a study of TiN thin films which are deposited by a Physical Vapour Deposition (PVD) and Ion Beam Assisted Deposition (IBAD). In the present investigation the subsequent ion implantation was provided with N5+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The thin film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films. A variety of analytic techniques were used for characterization, such as scratch test, calo test, Scanning electron microscopy (SEM), Atomic Force Microscope (AFM), X-ray diffraction (XRD) and Energy Dispersive X-ray analysis (EDAX). %P 335 - 340