@article{(Open Science Index):https://publications.waset.org/pdf/10003996,
	  title     = {Nano Effects of Nitrogen Ion Implantation on TiN Hard Coatings Deposited by PVD and IBAD},
	  author    = {Branko Skoric and  Aleksandar Miletic and  Pal Terek and  Lazar Kovacevic and  Milan Kukuruzovic },
	  country	= {},
	  institution	= {},
	  abstract     = {In this paper, we present the results of a study of TiN thin films which are deposited by a Physical Vapour Deposition (PVD) and Ion Beam Assisted Deposition (IBAD). In the present investigation the subsequent ion implantation was provided with N5+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The thin film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films. A variety of analytic techniques were used for characterization, such as scratch test, calo test, Scanning electron microscopy (SEM), Atomic Force Microscope (AFM), X-ray diffraction (XRD) and Energy Dispersive X-ray analysis (EDAX).},
	    journal   = {International Journal of Materials and Metallurgical Engineering},
	  volume    = {10},
	  number    = {3},
	  year      = {2016},
	  pages     = {335 - 340},
	  ee        = {https://publications.waset.org/pdf/10003996},
	  url   	= {https://publications.waset.org/vol/111},
	  bibsource = {https://publications.waset.org/},
	  issn  	= {eISSN: 1307-6892},
	  publisher = {World Academy of Science, Engineering and Technology},
	  index 	= {Open Science Index 111, 2016},
	}