{"title":"Influence of Different Thicknesses on Mechanical and Corrosion Properties of \u03b1-C:H Films","authors":"S. Tunmee, P. Wongpanya, I. Toda, X. L. Zhou, Y. Nakaya, N. Konkhunthot, S. Arakawa, H. Saitoh","volume":96,"journal":"International Journal of Materials and Metallurgical Engineering","pagesStart":1407,"pagesEnd":1413,"ISSN":"1307-6892","URL":"https:\/\/publications.waset.org\/pdf\/10000024","abstract":"
The hydrogenated amorphous carbon films (α-C:H)
\r\nwere deposited on p-type Si (100) substrates at different thicknesses by
\r\nradio frequency plasma enhanced chemical vapor deposition
\r\ntechnique (rf-PECVD). Raman spectra display asymmetric
\r\ndiamond-like carbon (DLC) peaks, representative of the α-C:H films.
\r\nThe decrease of intensity ID\/IG ratios revealed the sp3 content arise at
\r\ndifferent thicknesses of the α-C:H films. In terms of mechanical
\r\nproperties, the high hardness and elastic modulus values showed the
\r\nelastic and plastic deformation behaviors related to sp3 content in
\r\namorphous carbon films. Electrochemical properties showed that the
\r\nα-C:H films exhibited excellent corrosion resistance in air-saturated
\r\n3.5 wt.% NaCl solution for pH 2 at room temperature. Thickness
\r\nincreasing affected the small sp2 clusters in matrix, restricting the
\r\nvelocity transfer and exchange of electrons. The deposited α-C:H films
\r\nexhibited excellent mechanical properties and corrosion resistance.<\/p>\r\n","references":"[1] S. Kassavetis, A. Laskarakis, S. Logothetidis, \u201cEffect of ion\r\nbombardment and hydrogen pressure during deposition on the optical\r\nproperties of hydrogenated amorphous carbon thin films,\u201d Diamond\r\nRelat. Mater., vol. 20, pp. 109-114, November 2010.\r\n[2] H. Tsai, D.B. Bogy, \u201cCharacterization of diamond like carbon films and\r\ntheir application as overcoats on thin-film media for magenetic\r\nrecording,\u201d J. Vac. Sci. Tech., vol. A 5, no.6, pp. 3287, July 1987.\r\n[3] P. Tsai, K. Chen, \u201cEvaluation of microstructures and mechanical\r\nproperties of diamond like carbon films deposited by filtered cathodic arc\r\nplasma,\u201d Thin Solid Films, vol. 516, pp. 5440-5444, July 2008.\r\n[4] T. Itoh, N. Mutsukura, \u201cMechanical properties of a-C:H thin films\r\ndeposited by r.f. PECVD method,\u201d Vacuum, vol. 77, pp. 11-18, July 2004.\r\n[5] J. 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