WASET
	@article{(Open Science Index):https://publications.waset.org/pdf/10000024,
	  title     = {Influence of Different Thicknesses on Mechanical and Corrosion Properties of α-C:H Films},
	  author    = {S. Tunmee and  P. Wongpanya and  I. Toda and  X. L. Zhou and  Y. Nakaya and  N. Konkhunthot and  S. Arakawa and  H. Saitoh},
	  country	= {},
	  institution	= {},
	  abstract     = {The hydrogenated amorphous carbon films (α-C:H)
were deposited on p-type Si (100) substrates at different thicknesses by
radio frequency plasma enhanced chemical vapor deposition
technique (rf-PECVD). Raman spectra display asymmetric
diamond-like carbon (DLC) peaks, representative of the α-C:H films.
The decrease of intensity ID/IG ratios revealed the sp3 content arise at
different thicknesses of the α-C:H films. In terms of mechanical
properties, the high hardness and elastic modulus values showed the
elastic and plastic deformation behaviors related to sp3 content in
amorphous carbon films. Electrochemical properties showed that the
α-C:H films exhibited excellent corrosion resistance in air-saturated
3.5 wt.% NaCl solution for pH 2 at room temperature. Thickness
increasing affected the small sp2 clusters in matrix, restricting the
velocity transfer and exchange of electrons. The deposited α-C:H films
exhibited excellent mechanical properties and corrosion resistance.
},
	    journal   = {International Journal of Materials and Metallurgical Engineering},
	  volume    = {8},
	  number    = {12},
	  year      = {2014},
	  pages     = {1407 - 1412},
	  ee        = {https://publications.waset.org/pdf/10000024},
	  url   	= {https://publications.waset.org/vol/96},
	  bibsource = {https://publications.waset.org/},
	  issn  	= {eISSN: 1307-6892},
	  publisher = {World Academy of Science, Engineering and Technology},
	  index 	= {Open Science Index 96, 2014},
	}