%0 Journal Article
	%A S.Solaymani and  T.Ghodselahi and  N.B.Nezafat and  H.Zahrabi and  A.Gelali
	%D 2011
	%J International Journal of Materials and Metallurgical Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 52, 2011
	%T Characterization of Microroughness Parameters in Cu and Cu2O Nanoparticles Embedded in Carbon Film
	%U https://publications.waset.org/pdf/1
	%V 52
	%X The morphological parameter of a thin film surface
can be characterized by power spectral density (PSD) functions
which provides a better description to the topography than the RMS
roughness and imparts several useful information of the surface
including fractal and superstructure contributions. Through the
present study Nanoparticle copper/carbon composite films were
prepared by co-deposition of RF-Sputtering and RF-PECVD method 
from acetylene gas and copper target. Surface morphology of thin
films is characterized by using atomic force microscopy (AFM). The
Carbon content of our films was obtained by Rutherford Back
Scattering (RBS) and it varied from .4% to 78%. The power values of
power spectral density (PSD) for the AFM data were determined by
the fast Fourier transform (FFT) algorithms. We investigate the effect
of carbon on the roughness of thin films surface. Using such
information, roughness contributions of the surface have been
successfully extracted.
	%P 338 - 341