Magdaleno R. Vasquez Jr.


2 Effects of Surface Roughness on a Unimorph Piezoelectric Micro-Electro-Mechanical Systems Vibrational Energy Harvester Using Finite Element Method Modeling

Authors: Magdaleno R. Vasquez Jr., Jean Marriz M. Manzano, Marc D. Rosales, Maria Theresa G. De Leon


This paper discusses the effects of surface roughness on a cantilever beam vibrational energy harvester. A silicon sample was fabricated using MEMS fabrication processes. When etching silicon using deep reactive ion etching (DRIE) at large etch depths, rougher surfaces are observed as a result of increased response in process pressure, amount of coil power and increased helium backside cooling readings. To account for the effects of surface roughness on the characteristics of the cantilever beam, finite element method (FEM) modeling was performed using actual roughness data from fabricated samples. It was found that when etching about 550um of silicon, root mean square roughness parameter, Sq, varies by 1 to 3 um (at 100um thick) across a 6-inch wafer. Given this Sq variation, FEM simulations predict an 8 to148 Hz shift in the resonant frequency while having no significant effect on the output power. The significant shift in the resonant frequency implies that careful consideration of surface roughness from fabrication processes must be done when designing energy harvesters.

Keywords: MicroElectroMechanical Systems, Finite Element Method, Multiphysics Analysis, surface roughness, deep reactive ion etching, vibrational energy harvester

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1 Synergistic Studies of Multi-Flame Retarders Using Silica Nanoparticles, and Nitrogen and Phosphorus-Based Compounds for Polystyrene Using Response Surface Methodology

Authors: Mark Daniel G. de Luna, Florencio D. De Los Reyes, Magdaleno R. Vasquez Jr., Peerasak Paoprasert


The effect of adding silica nanoparticles (SiNPs) obtained from rice husk, and phosphorus and nitrogen based compounds namely 9,10-dihydro-9-oxa-10-phosphaphenantrene-10-oxide (DOPO) and melamine, respectively, on the flammability of polystyrene (PS) was studied using response surface methodology (RSM). The flammability of PS was reduced as the limiting oxygen index (LOI) values increased when the flame retardant additives were added. DOPO exhibited the best retarding property increasing the LOI value of PS by 42.4%. A quadratic model for LOI was obtained from the RSM results, with percent loading of SiNPs, DOPO, and melamine, as independent variables. The observed increase in the LOI value as the percent loading of the flame retardant additives is increased, was attributed both to the main effects and synergistic effects of the parameters, as the LOI response of SiNPs is greatly enhanced by the addition of DOPO and melamine, as shown by the response surface plots. This indicates the potential of producing a cheaper, effective, and non-toxic multi-flame retardant system for the polymeric system via different flame retarding mechanisms.

Keywords: Flame retardancy, polystyrene, response surface methodology, rice husk, silica nanoparticle

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