Vahid Sabermand and Yousef Hojjat and Majid Hasanzadeh
Study of Parameters Affecting the Electrostatic Attractions Force
1797 - 1800
2014
8
11
International Journal of Mechanical and Mechatronics Engineering
https://publications.waset.org/pdf/9999970
https://publications.waset.org/vol/95
World Academy of Science, Engineering and Technology
This paper contains 2 main parts. In the first part of paper we simulated and studied three types of electrode patterns used in various industries for suspension and handling of the semiconductor and glass and we selected the best pattern by evaluating the electrostatic force, which was comb pattern electrode.
In the second part we investigated the parameters affecting the amount of electrostatic force such as the gap between surface and electrode (g), the electrode width (w), the gap between electrodes (t), the surface permittivity and electrode length and methods of improvement of adhesion force by changing these values.
Open Science Index 95, 2014