Z. C. Chang and S. C. Liang
The Microstructure of Aging ZnO, AZO, and GZO Films
451 - 453
2014
8
5
International Journal of Chemical and Molecular Engineering
https://publications.waset.org/pdf/9998436
https://publications.waset.org/vol/89
World Academy of Science, Engineering and Technology
RF magnetron sputtering is used on the ceramic targets, each of which contains zinc oxide (ZnO), zinc oxide doped with aluminum (AZO) and zinc oxide doped with gallium (GZO). The electric conduction mechanism of the AZO and GZO films came mainly from the Al and Ga, the oxygen vacancies, Zn interstitial atoms, and Al andor Ga interstitial atoms. AZO and GZO films achieved higher conduction than did ZnO film, it being ion vacant and nonstoichiometric. The XRD analysis showed a preferred orientation along the (002) plane for ZnO, AZO, and GZO films.
Open Science Index 89, 2014