J. Mizuno and S. Takahashi, Design and Fabrication of an Electrostatically Actuated Parallel-Plate Mirror by 3D-Printer . journal = {International Journal of Electrical and Computer Engineering}, [online]. World Academy of Science, Engineering and Technology. April 2014, vol. 89(5). 932 - 934 [viewed 20 September 2024]. Available from: https://publications.waset.org/pdf/9998265.