WASET
    Sheng-Ming Huang and  Nan-Chyuan Tsai and  Chih-Che Lin and  Chun-Chi Lin,  Intelligent Face-Up CMP System Integrated with On-Line Optical Measurements.   journal   = {International Journal of Physical and Mathematical Sciences}, [online]. World Academy of Science, Engineering and Technology.
    November 2013, vol. 84(12). 1682 - 1688
    [viewed 07 May 2024]. Available from: https://publications.waset.org/pdf/9996718.