@article{(Open Science Index):https://publications.waset.org/pdf/9996718,
	  title     = {Intelligent Face-Up CMP System Integrated with On-Line Optical Measurements},
	  author    = {Sheng-Ming Huang and  Nan-Chyuan Tsai and  Chih-Che Lin and  Chun-Chi Lin},
	  country	= {},
	  institution	= {},
	  abstract     = {An innovative design for intelligent Chemical Mechanical Polishing (CMP) system is proposed and verified by experiments in this report. On-line measurement and real-time feedback are integrated to eliminate the shortcomings of traditional approaches, e.g., the batch-to-batch discrepancy of required polishing time, over consumption of chemical slurry, and non-uniformity across the wafer. The major advantage of the proposed method is that the finish of local surface roughness can be consistent, no matter where the inner-ring region or outer-ring region is concerned. Secondly, it is able to eliminate the Edge effect. Conventionally, the interfacial induced stress near the wafer edge is generally much higher than that near the wafer center. At last, by using the proposed intelligent chemical mechanical polishing strategy, the cost of the entire machining cycle can be much reduced while the quality of the finished goods certainly upgraded.
},
	    journal   = {International Journal of Physical and Mathematical Sciences},
	  volume    = {7},
	  number    = {12},
	  year      = {2013},
	  pages     = {1682 - 1688},
	  ee        = {https://publications.waset.org/pdf/9996718},
	  url   	= {https://publications.waset.org/vol/84},
	  bibsource = {https://publications.waset.org/},
	  issn  	= {eISSN: 1307-6892},
	  publisher = {World Academy of Science, Engineering and Technology},
	  index 	= {Open Science Index 84, 2013},
	}