%0 Journal Article %A Mutabar Shah and Muhammad Hassan Sayyad and Khasan S. Karimov %D 2008 %J International Journal of Aerospace and Mechanical Engineering %B World Academy of Science, Engineering and Technology %I Open Science Index 19, 2008 %T Fabrication and Study of Nickel Phthalocyanine based Surface Type Capacitive Sensors %U https://publications.waset.org/pdf/899 %V 19 %X Thin films of Nickel phthalocynine (NiPc) of different thicknesses (100, 150 and 200 nm) were deposited by thermal evaporator on glass substrates with preliminary deposited aluminum electrodes to form Al/NiPc/Al surface-type capacitive humidity sensors. The capacitance-humidity relationships of the sensors were investigated at humidity levels from 35 to 90% RH. It was observed that the capacitance value increases nonlinearly with increasing humidity level. All measurements were taken at room temperature. %P 113 - 115