@article{(Open Science Index):https://publications.waset.org/pdf/899, title = {Fabrication and Study of Nickel Phthalocyanine based Surface Type Capacitive Sensors}, author = {Mutabar Shah and Muhammad Hassan Sayyad and Khasan S. Karimov}, country = {}, institution = {}, abstract = {Thin films of Nickel phthalocynine (NiPc) of different thicknesses (100, 150 and 200 nm) were deposited by thermal evaporator on glass substrates with preliminary deposited aluminum electrodes to form Al/NiPc/Al surface-type capacitive humidity sensors. The capacitance-humidity relationships of the sensors were investigated at humidity levels from 35 to 90% RH. It was observed that the capacitance value increases nonlinearly with increasing humidity level. All measurements were taken at room temperature.}, journal = {International Journal of Aerospace and Mechanical Engineering}, volume = {2}, number = {7}, year = {2008}, pages = {113 - 115}, ee = {https://publications.waset.org/pdf/899}, url = {https://publications.waset.org/vol/19}, bibsource = {https://publications.waset.org/}, issn = {eISSN: 1307-6892}, publisher = {World Academy of Science, Engineering and Technology}, index = {Open Science Index 19, 2008}, }