Nan-Chyuan Tsai and Jiun-Sheng Liou and Chih-Che Lin and Tuan Li
Design of Electromagnetic Drive Module for Microgyroscope
1534 - 1539
2010
4
10
International Journal of Computer and Systems Engineering
https://publications.waset.org/pdf/8141
https://publications.waset.org/vol/46
World Academy of Science, Engineering and Technology
For microgyroscopes, the angular rate detection components have to oscillate forwards and backwards alternatively. An innovative design of microelectromagnetic drive module is proposed to make a Πtype disc reciprocally and efficiently rotate within a certain of angular interval. Twelve Electromagnetic poles enclosing the thin disc are designed to provide the magnetic drive power. Isotropic etching technique is employed to fabricate the highaspectratio trench, so that the contact angle of wire against trench can be increased and the potential defect of cavities and pores within the wire can be prevented. On the other hand, a Πtype thin disc is designed to conduct the pitch motion as an angular excitation, in addition to spinning, is exerted on the gyroscope. The efficacy of the micromagnetic drive module is verified by the commercial software, Ansoft Maxewll. In comparison with the conventional planar windings in microscale systems, the magnetic drive force is increased by 150.
Open Science Index 46, 2010