Dmitry S. Sitnikov and Andrey V. Ovchinnikov
Application of Femtosecond Laser pulses for Nanometer Accuracy Profiling of Quartz and Diamond Substrates and for MultiLayered Targets and ThinFilm Conductors Processing
931 - 933
2011
5
7
International Journal of Physical and Mathematical Sciences
https://publications.waset.org/pdf/6750
https://publications.waset.org/vol/55
World Academy of Science, Engineering and Technology
Research results and optimal parameters investigation
of laser cut and profiling of diamond and quartz substrates by
femtosecond laser pulses are presented. Profiles 10 μm in width, 25
μm in depth and several millimeters long were made. Investigation of
boundaries quality has been carried out with the use of AFM
«Vecco». Possibility of technological formation of profiles and
microholes in diamond and quartz substrates with nanometerscale
boundaries is shown. Experimental results of multilayer dielectric
cover treatment are also presented. Possibility of precise upper layer
(thickness of 70–140 nm) removal is demonstrated. Processes of thin
metal film (60 nm and 350 nm thick) treatment are considered.
Isolation tracks (conductance 1011 S) 1.6–2.5 μm in width in
conductive metal layers are formed.
Open Science Index 55, 2011