Hamdi Muhyuddin D. Barra and Henry J. Ramos, Deposition Rate and Energy Enhancements of TiN Thin-Film in a Magnetized Sheet Plasma Source. journal = {International Journal of Materials and Metallurgical Engineering}, [online]. World Academy of Science, Engineering and Technology. February 2011, vol. 50(2). 114 - 116 [viewed 23 September 2024]. Available from: https://publications.waset.org/pdf/5984.