%0 Journal Article
	%A Yinchang Du and  Yangfang Li
	%D 2012
	%J International Journal of Physical and Mathematical Sciences
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 71, 2012
	%T Plasma Density Distribution in Asymmetric Geometry Capacitive Coupled Plasma Discharge System
	%U https://publications.waset.org/pdf/5878
	%V 71
	%X In this work, we used the single Langmuir probe to
measure the plasma density distribution in an geometrically
asymmetric capacitive coupled plasma discharge system. Because of
the frame structure of powered electrode, the plasma density was not
homogeneous in the discharge volume. It was higher under the frame,
but lower in the centre. Finite element simulation results showed a
good agreement with the experiment results. To increase the electron
density in the central volume and improve the homogeneity of the
plasma, we added an auxiliary electrode, powered by DC voltage, in
the simulation geometry. The simulation results showed that the
auxiliary electrode could alter the potential distribution and improve
the density homogeneity effectively.
	%P 1534 - 1537