@article{(Open Science Index):https://publications.waset.org/pdf/3529, title = {The Influence of Substrate Bias on the Mechanical Properties of a W- and S-containing DLC-based Solid-lubricant Film}, author = {Guojia Ma and Guoqiang Lin and Shuili Gong and Gang Sun and Dawang Wang}, country = {}, institution = {}, abstract = {A diamond-like carbon (DLC) based solid-lubricant film was designed and DLC films were successfully prepared using a microwave plasma enhanced magnetron sputtering deposition technology. Post-test characterizations including Raman spectrometry, X-ray diffraction, nano-indentation test, adhesion test, friction coefficient test were performed to study the influence of substrate bias voltage on the mechanical properties of the W- and S-doped DLC films. The results indicated that the W- and S-doped DLC films also had the typical structure of DLC films and a better mechanical performance achieved by the application of a substrate bias of -200V.}, journal = {International Journal of Materials and Metallurgical Engineering}, volume = {6}, number = {8}, year = {2012}, pages = {718 - 721}, ee = {https://publications.waset.org/pdf/3529}, url = {https://publications.waset.org/vol/68}, bibsource = {https://publications.waset.org/}, issn = {eISSN: 1307-6892}, publisher = {World Academy of Science, Engineering and Technology}, index = {Open Science Index 68, 2012}, }